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Monte Carlo Simulation of an Ion Sputtering Process of Polymer Materials

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Secondary Ion Mass Spectrometry SIMS IV

Part of the book series: Springer Series in Chemical Physics ((CHEMICAL,volume 36))

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Abstract

Recently, the surface analysis of polymer materials has been becoming more and more important in industry. SIMS is expected to become a powerful tool for characterization of polymer surfaces. Several authors [1–5] have discussed the potential of SIMS in the field. However, understanding of sputtering mechanism of polymers is far from a satisfactory level. In this paper, we have examined sputtered surfaces with XPX and interpreted the observed spectra with a simple calculation based on Monte Carlo simulation.

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References

  1. J. A. Gardella, Jr. and D. M. Hercules: Anal. Chem. 52, 226 (1980)

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  2. J. A. Gardella, Jr. and D. M. Hercules: Anal. Chem. 53, 1879 (1981)

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Author information

Authors and Affiliations

  1. Toray Research Center, Inc., Sonoyama, Otsu, Shiga 520, Japan

    T. Takahagi, K. Okuno, S. Tomita & A. Ishitani

Authors
  1. T. Takahagi
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  2. K. Okuno
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  3. S. Tomita
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  4. A. Ishitani
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Editor information

Editors and Affiliations

  1. Phsysikalisches Inst., Universität Münster, Münster, D-4400, Fed. Rep. of Germany

    A. Benninghoven

  2. College of General Education, Osaka University, Osaka 560, Japan

    J. Okano

  3. Department of Applied Physics, Osaka University, Osaka 565, Japan

    R. Shimizu

  4. Philips Research Laboratories, Eindhoven, The Netherlands

    H. W. Werner

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© 1984 Springer-Verlag Berlin Heidelberg

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Takahagi, T., Okuno, K., Tomita, S., Ishitani, A. (1984). Monte Carlo Simulation of an Ion Sputtering Process of Polymer Materials. In: Benninghoven, A., Okano, J., Shimizu, R., Werner, H.W. (eds) Secondary Ion Mass Spectrometry SIMS IV. Springer Series in Chemical Physics, vol 36. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-82256-8_100

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  • DOI: https://doi.org/10.1007/978-3-642-82256-8_100

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-82258-2

  • Online ISBN: 978-3-642-82256-8

  • eBook Packages: Springer Book Archive

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