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Surface Compositional Changes by Particle Bombardment

  • R. Kelly
Chapter
Part of the Springer Series in Chemical Physics book series (CHEMICAL, volume 35)

Abstract

Bombardment-induced compositional change, also termed preferential sputtering, tends to be of very wide occurrence. The causes are not clear in all cases, namely, whether a preferentially lost species is lighter, less tightly bound, larger, subject to an electronic interaction, or subject to some aspect of diffusion. Nevertheless, the loss of C from TaC [7.1],
is probably correctly taken as loss occurring because C is lighter. Loss of Pb from Pb-In [7.2],
is a reasonable example where some aspect of chemical bonding is involved.

Keywords

Compositional Change Heavy Component Surface Binding Energy Recoil Implantation Mass Correlation 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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© Springer-Verlag Berlin Heidelberg 1984

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  • R. Kelly

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