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Angle-Resolved Secondary Ion Mass Spectrometry

  • N. Winograd
Chapter
Part of the Springer Series in Chemical Physics book series (CHEMICAL, volume 35)

Abstract

The response of a solid to energetic ion bombardment has been of interest to scientists since the initial observation by Grove [17.1] that cathodes in gas discharge tubes were subject to erosion. The reason for this erosion is that when a keV ion strikes a solid, there is sufficient momentum transferred to the target atoms to initiate considerable nuclear motion, Fig.17.1. A fraction of the moving atoms may obtain a component of momentum oriented into the vacuum such that they are able to overcome the surface binding force and eject from the solid. Ion/solid interactions of this type are studied today from a wide variety of perspectives. Some of the particles emerge directly as positive or negative ions, while others are ejected as either ground or excited state neutral atoms. The emission process and the associated radiation damage in the solid are referred to as sputtering—an often critized term [17.2,3] which, however, appears destined to remain with us for some time.

Keywords

Angular Distribution Step Edge Azimuthal Anisotropy Polar Angle Distribution Local Thermal Equilibrium Model 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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© Springer-Verlag Berlin Heidelberg 1984

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  • N. Winograd

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