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Angle-Resolved Secondary Ion Mass Spectrometry

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Chemistry and Physics of Solid Surfaces V

Part of the book series: Springer Series in Chemical Physics ((CHEMICAL,volume 35))

Abstract

The response of a solid to energetic ion bombardment has been of interest to scientists since the initial observation by Grove [17.1] that cathodes in gas discharge tubes were subject to erosion. The reason for this erosion is that when a keV ion strikes a solid, there is sufficient momentum transferred to the target atoms to initiate considerable nuclear motion, Fig.17.1. A fraction of the moving atoms may obtain a component of momentum oriented into the vacuum such that they are able to overcome the surface binding force and eject from the solid. Ion/solid interactions of this type are studied today from a wide variety of perspectives. Some of the particles emerge directly as positive or negative ions, while others are ejected as either ground or excited state neutral atoms. The emission process and the associated radiation damage in the solid are referred to as sputtering—an often critized term [17.2,3] which, however, appears destined to remain with us for some time.

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Authors
  1. N. Winograd
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Editors and Affiliations

  1. Department of Chemistry and Laboratory for Surface Studies, The University of Wisconsin-Milwaukee, 53201, Milwaukee, WI, USA

    Ralf Vanselow

  2. Department of Chemistry, University of Auckland, Private Bag, Auckland, New Zealand

    Russell Howe

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© 1984 Springer-Verlag Berlin Heidelberg

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Winograd, N. (1984). Angle-Resolved Secondary Ion Mass Spectrometry. In: Vanselow, R., Howe, R. (eds) Chemistry and Physics of Solid Surfaces V. Springer Series in Chemical Physics, vol 35. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-82253-7_17

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  • DOI: https://doi.org/10.1007/978-3-642-82253-7_17

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-82255-1

  • Online ISBN: 978-3-642-82253-7

  • eBook Packages: Springer Book Archive

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