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Growth from the Vapor Phase

  • Chapter
Modern Crystallography III

Part of the book series: Springer Series in Solid-State Sciences ((SSSOL,volume 36))

Abstract

The statistics in publications on crystal growth show that a large portion (~25% – 30%) of the papers in this field are devoted to the growth of crystals and films from the vapor phase. Together with crystallization from melts or solutions, crystallization from the vapor phase can be considered one of the most commonly used methods of crystal growth, particularly in semiconductor electronics. This chapter gives a systematic account of the foundations of the methods generally used to grow crystals from the vapor: physical vapor deposition (molecular-beam method, cathode sputtering, vapor phase crystallization in a closed system, gas flow crystallization); chemical vapor deposition (chemical transport, vapor decomposition, vapor synthesis); and crystallization from the vapor via a liquid zone. Growth mechanisms and the typical parameters of growth processes and of the grown crystals are also discussed for each technique.

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Reference

  1. G.R. Booker, B.A. Joyce: Philos. Mag. 14, 301 (1966)

    CAS  Google Scholar 

  2. Yu. Khariton, A.I. Shal’nikov: Mekhanizm kondensatsii i obrazovaniye kolloidov (Condensation Mechanism and the Formation of Colloids) ( Gostekhteorizdat, Leningrad 1934 )

    Google Scholar 

  3. M.H. Francombe, J.E. Johnson: “The Preparation and Properties of Semi-conductor Films”, in Physics of Thin Films, Vol. 5, ed. by G. Hass, R.E. Thun ( Academic, New York 1969 ) p. 143

    Google Scholar 

  4. H.M. Manasevit: J. Cryst. Growth 22, 125 (1974)

    CAS  Google Scholar 

  5. G.W. Cullen: In Heteroepitaxial Semiconductors for Electronic Devices, ed. by G.W. Cullen, C.C. Wang ( Springer, Berlin, Heidelberg, New York 1978 )

    Google Scholar 

  6. J. Cryst. Growth (special issue) 58 (1982)

    Google Scholar 

  7. E.I. Givargizov, N.N. Sheftal’, V.I. Klykov: “Oriented Crystallization on Amorphous Substrates”, Current Topics Mat. Sci., Vol.10 ( North-Holland, Amsterdam 1982 ), pp. 1–53

    Google Scholar 

  8. N.N. Sheftal’: “Trends in Real Crystal Formation and Some Principles for Single-Crystal Growth”, in Growth of Crystals, Vol. 10, ed. by N.N. Sheftal’ ( Consultants Bureau, New York 1976 ) pp. 185–210

    Google Scholar 

  9. V.I. Klykov, N.N. Sheftal’, E. Hartmann: Acta Phys. Acad. Sci. Hung. 47, 167 (1979)

    CAS  Google Scholar 

  10. M.W. Geis, D.C. Flanders, H.I. Smith: Appl. Phys. Lett. 35, 71 (1979)

    CAS  Google Scholar 

  11. M.W. Geis, D.A. Antoniadis, D.J. Silversmith, R.W. Mountain, H.I. Smith: Appl. Phys. Lett. 37, 454 (1980)

    CAS  Google Scholar 

  12. C. Weissmantel: J. Vac. Sci. Technol. 18, 179 (1981)

    CAS  Google Scholar 

  13. R. Anton, H. Poppa, D.C. Flanders: J. Cryst. Growth 56, 433 (1982)

    CAS  Google Scholar 

  14. L.S. Darken, D.H. Lowndes: 161st Electrochem. Soc. Meeting, Montreal, Canada, May 1982, Extended Abstracts

    Google Scholar 

  15. J.C.C. Fan, M.W. Geis, 8.-Y•. Tsaur: Appl. Phys. Lett. 38, 365 (1981)

    CAS  Google Scholar 

  16. B.-Y. Tsaur, J.C.C. Fan, M.W. Geis, D.J. Silversmith, R.W. Mountain: Appl. Phys. Lett. 39, 561 (1981)

    CAS  Google Scholar 

  17. R.W. McClelland, C.O. Bozler, J.C.C. Fan: Appl. Phys. Lett. 37, 560 (1980)

    CAS  Google Scholar 

  18. P. Vohl, C.O. Bozler, R.W. McClelland, A. Chu, A.J. Strauss: J. Cryst. Growth 56, 410 (1982)

    CAS  Google Scholar 

  19. L. Holland: Vacuum Deposition of Thin Films ( Chapman and Hall, London 1956 )

    Google Scholar 

  20. P. Archibald, E. Parent: Solid State Technol. 19, N7, 32 (1976)

    Google Scholar 

  21. B.J. Miller, J.H. McFee: J. Electrochem. Soc. 125, 1310 (1978)

    CAS  Google Scholar 

  22. K.-G. Günther: “Vaporization and Reaction of the Elements”, in Compound Semiconductors, Vol. 1, Preparation of III-V Compounds, ed. by R.K. Willardson, H.L. Goering (Reinhold, New York 1962 ) p. 313

    Google Scholar 

  23. H. Freller, K.G. Günther: Thin Solid Films 88, 291 (1982)

    Google Scholar 

  24. K. Morimoto, H. Watanabe, S. Itoh: J. Cryst. Growth 45, 334 (1978)

    CAS  Google Scholar 

  25. R.D. Gretz, C.M. Jackson, J.P. Hirth: Surf. Sci. 6, 171 (1967)

    CAS  Google Scholar 

  26. A.Y. Cho, J.R. Arthur: “Molecular Beam Epitaxy”, in Progress in Solid State Chemistry, Vol.10, ed. by G. Somorjai, J. McCaldin (Pergamon, New York, 1975 )

    Google Scholar 

  27. A.C. Gossard, P.M. Petroff, W. Weigman, R. Dingle, A. Savage: Appl. Phys. Lett. 29, 323 (1976)

    CAS  Google Scholar 

  28. Progr. Cryst. Growth and Characterization (special issue), 2 p.1 (1979)

    Google Scholar 

  29. R.Z. Bachrach: “MBE — Molecular Beam Epitaxial Evaporative Growth”, in Crystal Growth, ed. by B. Pamplin ( Pergamon, London 1980 )

    Google Scholar 

  30. R.F.C. Farrow: J. Vac. Sci. Technol. 19, 150 (1981)

    CAS  Google Scholar 

  31. E. Kasper: Appl. Phys. A28, 1 (1982)

    Google Scholar 

  32. P.E. Luscher: Thin Solid Films 83, 125 (1981)

    CAS  Google Scholar 

  33. T. Yao, S. Maekawa: J. Cryst. Growth 53, 423 (1981)

    CAS  Google Scholar 

  34. F. Kitagawa, T. Mishima, K. Takahashi: J. Electrochem. Soc.127, 937 (1980)

    Google Scholar 

  35. J.P. Faurie, A. Millon: J. Cryst. Growth 54, 577, 582 (1981)

    CAS  Google Scholar 

  36. A.A. Tikhonova: Kristallografiya 20, 615 (1975) [English transl.: Soy. Phys. Crystallogr.20, 375 (1975)]

    Google Scholar 

  37. L.I. Maissel: “The Deposition of Thin Films by Cathode Sputtering”, in Physics of Thin Films, Vol. 3, ed. by G. Hass, R.E. Thun ( Academic, New York 1966 ) p. 61

    Google Scholar 

  38. J.E. Greene, S.A. Barnett, K.C. Cadien, M.A. Ray: J. Cryst. Growth 56, 389 (1982)

    CAS  Google Scholar 

  39. V. Hoffman: Solid State Technol. 19, N12, 57 (1976)

    Google Scholar 

  40. L. Holland: Thin Solid Films 86, 227 (1981)

    CAS  Google Scholar 

  41. A.R. Nyaiesh: Thin Solid Films 86, 267 (1981)

    CAS  Google Scholar 

  42. K. Urbanek: Solid State Techno1.20, N7, 87 (1977)

    Google Scholar 

  43. R. Adachi, K. Takashita: J. Vac. Sci. Techno1. 20, 98 (1982)

    CAS  Google Scholar 

  44. J.E. Varga, W.A. Bailey: Solid State Technol. 20, N12, 67 (1973)

    Google Scholar 

  45. A.E.T. Kuiper, G.E. Thomas, W.J. Schouten: J. Cryst. Growth 45, 332 (1978)

    CAS  Google Scholar 

  46. T. Spalvins: J. Vac. Sci. Techno1. 17, 315 (1980)

    CAS  Google Scholar 

  47. A. Matthews, D.G. Teer: Thin Solid Films 80, 41 (1981)

    Google Scholar 

  48. J.N. Avaritsiotis, R.P. Howson: Thin Solid Films 77, 351 (1981)

    CAS  Google Scholar 

  49. H.S. Randhava, M.D. Matthews, R.F. Bunshah: Thin Solid Films 83, 267 (1981)

    Google Scholar 

  50. E. Kaldis: “Principles of the Vapour Growth of Single Crystals”, in Crystal Growth. Theory and Techniques, Vol. 1, ed. by C.H.L. Goodman ( Plenum, New York 1974 ) p. 49

    Google Scholar 

  51. M.M. Factor, I. Garrett: Gi’owth of Crystals from the Vapour (Chapham and Hall, London 1974)

    Google Scholar 

  52. E. Schönherr: “The Growth of Large Crystals from the Vapour Phase”, Crystals, Vol. 2 ( Springer, Berlin, Heidelberg, New York 1980 )

    Google Scholar 

  53. V.P. Zlomanov, E.V. Masyakin, A.V. Novoselova: J. Cryst. Growth 26, 261 (1974)

    CAS  Google Scholar 

  54. S.J.C. Irvine, J.B. Mullin: J. Cryst. Growth 53, 458 (1981)

    Google Scholar 

  55. K. Mochizuki: J. Cryst. Growth 53, 355 (1981)

    CAS  Google Scholar 

  56. K. Kinoshita, S. Miyazawa: J. Cryst. Growth 57, 141 (1982)

    CAS  Google Scholar 

  57. J. Morimoto, T. Ito, T. Yoshioka, T. Miyakawa: J. Cryst. Growth 57, 362 (1982)

    CAS  Google Scholar 

  58. E. Schönherr: J. Cryst. Growth 57, 493 (1982)

    Google Scholar 

  59. C. Barta, E. Kostal, A. Triska: Cryst. Res. Technol. l7, 411 (1982)

    Google Scholar 

  60. Yu.M. Tairov, V.F. Tsvetkov: J. Cryst. Growth 52, 146 (1981)

    CAS  Google Scholar 

  61. R. Triboulet: Rev. Phys. Appl. 12, 123 (1977)

    CAS  Google Scholar 

  62. T. Taguchi, S. Fujita, Y. Inuishi: J. Cryst. Growth 45, 204 (1978)

    CAS  Google Scholar 

  63. R. Triboulet, Y. Marfaing: J. Cryst. Growth 51, 89 (1981)

    CAS  Google Scholar 

  64. H. Kezuka, K. Iwamura, T. Masaki: Thin Solid Films 83, 47 (1981)

    CAS  Google Scholar 

  65. Yu.A. Vodakov, E.N. Mokhov, M.G. Ramm, A.D. Roenkov: Krist. Tech. 14, 729 (1979);

    Google Scholar 

  66. E.N. Mokhov, I.L. Shulpina, A.S. Tregulova, Yu.A. Vodakov: Cryst. Res. Technol. l6, 879 (1981)

    Google Scholar 

  67. A. Lopez-Otero: Thin Solid Films 49, 3 (1978)

    CAS  Google Scholar 

  68. W.M. Yim, E.J. Stofko: J. Electrochem. Soc.119, 381 (1972)

    Google Scholar 

  69. A. Lely: Ber. Dtsch. Keram. Ges. 32, 229 (1955)

    Google Scholar 

  70. E.V. Markov, A.A. Davydov: Izv. Akad. Nauk SSSR, Neorg. Mater. 7, 575 (1971)

    CAS  Google Scholar 

  71. H. Schäfer: Chemische Transportreaktionen (Verlag Chemie, Weinheim 1961)

    Google Scholar 

  72. R. Nitsche: Fortschr. Mineral 44, 231 (1966)

    Google Scholar 

  73. J. Mercier: J. Cryst. Growth 56, 235 (1982)

    Google Scholar 

  74. H. Scholz, R. Kluckow: J. Phys. Chem. Solids, Suppl.l, 475 (1967); H. Scholz: Acta Electron.17, 69 (1974)

    Google Scholar 

  75. M. Schieber, M.F. Schnepple, L. Van den Berg: J. Cryst. Growth 33, 125 (1976)

    CAS  Google Scholar 

  76. L.A. Zadorozhnaya, V.A. Lyakhovitskaya, E.I. Givargizov, L.M. Belyaev: J. Cryst. Growth 41, 61 (1977)

    CAS  Google Scholar 

  77. L.S. Gagara, P.A. Gashin, G.G. Dvornik, V.V. Leondar, P.S. Paskal, A.V. Simashkevich: Cryst. Res. Technol. l7, 345 (1981)

    Google Scholar 

  78. M. Aoki, K. Tada, T. Murai, T. Inoue: Thin Solid Films 83, 283 (1981)

    CAS  Google Scholar 

  79. M. Shimizu, T. Shiozaki, A. Kawabata: J. Cryst. Growth 57, 94 (1982)

    CAS  Google Scholar 

  80. F.H. Nicoll: J. Electrochem. Soc. 110, 1165 (1963)

    CAS  Google Scholar 

  81. J. Nishizawa: “Aspects of Silicon Epitaxy”, in Crystal Growth. Theory and Techniques, Vol. 2, ed. by C.H.L. Goodman ( Plenum, New York 1978 ) p. 57

    Google Scholar 

  82. N.N. Sheftal’, N.P. Kokorish, A.V. Krasilov: Izv. Akad. Nauk SSSR, Ser. Fiz. 21, 146 (1957)

    Google Scholar 

  83. H.C. Theuerer: J. Electrochem. Soc.108, 649 (1961)

    Google Scholar 

  84. J. Bloem, L.J. Gilling:•“Mechanisms of the Chemical Vapour Deposition of Silicon”, Current Topics Mat. Sci., Vol.1 ( North-Holland, Amsterdam 1978 ) p. 147

    Google Scholar 

  85. J. Bloem: J. Cryst. Growth 50, 581 (1980)

    CAS  Google Scholar 

  86. J. Bloem, W.A.P. Claassen, W.C.J.N. Valkenburg: J. Cryst. Growth 57, 177 (1982)

    CAS  Google Scholar 

  87. K.E. Bean: Thin Solid Films 83, 173 (1981)

    Google Scholar 

  88. W. Steinmaier: Philips Res. Rep.18, 75 (1963)

    Google Scholar 

  89. E. Sirti, L.P. Hunt, D.H. Sawyer: J. Electrochem. Soc. 121, 919 (1974)

    Google Scholar 

  90. V.S. Ban: J. Electrochem. Soc. 125, 317 (1978)

    CAS  Google Scholar 

  91. F. Eversteyn, P. Severin, C.H. Brekel: J. Electrochem. Soc.117, 925 (1970)

    Google Scholar 

  92. E.I. Givargizov: Fiz. Tverd. Tela 6 1804 (1964) [English transl.: Sov. Phys. Solid State 6 1415 (1964)]

    Google Scholar 

  93. D.C. Gupta: Solid State Technol. l4, 33 (1978)

    Google Scholar 

  94. M.L. Hammond: Solid State Techno1. 21, 68 (1978)

    CAS  Google Scholar 

  95. Y.S. Chiang, G.W. Looney: J. Electrochem. Soc. 120, 550 (1973)

    CAS  Google Scholar 

  96. W.G. Townsend, M.E. Uddin: Solid State Technol. 16, N3, 39 (1973)

    Google Scholar 

  97. M.J.-P. Duchemin, M.M. Bonnet, M.F. Koelsch: J. Electrochem. Soc.125, 637 (1978)

    Google Scholar 

  98. J.L. Gentner, C. Bernard, R. Cadoret: J. Cryst. Growth 56, 332 (1982)

    CAS  Google Scholar 

  99. R.S. Rosler: Solid State Technol. 20, N4, 63 (1977)

    Google Scholar 

  100. C.H.J. van den Brekel, L.J.M. Bollen: J. Cryst. Growth 54, 310 (1981)

    Google Scholar 

  101. W.A.P. Claassen, J. Bloem, W.G.J.N. Valkenburg, C.H.J. van den Brekel: J. Cryst. Growth 57, 259 (1982)

    CAS  Google Scholar 

  102. C.F. Powell, J.H. Oxley, J.M. Blocher (eds.): Vapor Deposition ( Wiley, New York 1966 )

    Google Scholar 

  103. B.V. Derjaguin, B.V. Spitsyn, A.E. Gorodetsky, A.P. Zakharov, L.L. Bouilov, A.E. Alekseenko: J. Cryst. Growth 31, 44 (1975)

    Google Scholar 

  104. B.V. Spitsyn, L.L. Bouilov, B.V. Derjaguin: J. Cryst. Growth 52, 219 (1981)

    CAS  Google Scholar 

  105. W. von Muench, E. Pettenpaul: J. Electrochem. Soc. 125, 294 (1978)

    Google Scholar 

  106. W.M. Feist, S.R. Steel, D W Readey: “The Preparation of Films by Chemical Vapour Deposition”, in Physics of Thin Films, Vol. 5 ( Academic, New York 1969 ) p. 237

    Google Scholar 

  107. J.R. Knight, D. Effer, P.R. Evans: Solid State Electron. 8, 178 (1965)

    Google Scholar 

  108. J.V. DiLorenzo: J. Cryst. Growth 17, 189 (1972)

    Google Scholar 

  109. T. Mizutani, M. Yoshida, A. Usui, H. Watanabe, T. Yuasa, I. Hayashi: Jpn. J. Appl. Phys./9, L113 (1980)

    Google Scholar 

  110. P. Vohl: J. Cryst. Growth 54, 101 (1981)

    CAS  Google Scholar 

  111. G.H. Olsen, C.J. Nuese, M. Ettenberg: Appl. Phys. Lett. 34, 262 (1979)

    CAS  Google Scholar 

  112. H. Seki, A. Koukitu, M. Matsumara: J. Cryst. Growth 54, 615 (1981)

    CAS  Google Scholar 

  113. J. Cryst. Growth (special issue: “Metalorganic Vapor Phase Epitaxy”) 55 (1981)

    Google Scholar 

  114. M. Morita, N. Uesugi, S. Isogai, K. Tsubouchi, N. Mikoshiba: Jpn. J. Appl. Phys. 20, 17 (1981)

    CAS  Google Scholar 

  115. T. Fukui, Y. Horikoshi: Jpn. J. Appl. Phys. 20, 587 (1981)

    CAS  Google Scholar 

  116. R.M. Biefeld: J. Cryst. Growth 56, 382 (1982)

    CAS  Google Scholar 

  117. S.J.C. Irvine, J.B. Mullin, A. Royle: J. Cryst. Growth 57, 15 (1982)

    CAS  Google Scholar 

  118. K. Shohno, H. Ohtake, J. Bloem: J. Cryst. Growth 45, 187 (1978)

    CAS  Google Scholar 

  119. M. Sano, M. Aoki: Thin Solid Films 83, 247 (1981)

    CAS  Google Scholar 

  120. T. Muranoi, M. Furukoshi: J. Electrochem. Soc.127, 2295 (1980)

    Google Scholar 

  121. T. Matsumoto, T. Morita, T. Ishida: J. Cryst. Growth 53, 225 (1981)

    CAS  Google Scholar 

  122. M.D. Scott, J.O. Williams, R.C. Goodfellow: J. Cryst. Growth 51, 267 (1981)

    CAS  Google Scholar 

  123. A.E.T. Kuiper, G E Thomas, W J Schouten: J. Cryst. Growth 51, 17 (1981)

    CAS  Google Scholar 

  124. S.N. Maximovsky, I.P. Revocatova, M.A. Selezneva: J. Cryst. Growth 52, 141 (1981)

    Google Scholar 

  125. I.W. Boyd, J.I.B. Wilson, J.L. West: Thin Solid Films 83, L173 (1981)

    Google Scholar 

  126. M. Hanabusa, A. Namiki, K. Yoshihara: Appl. Phys. Lett. 35, 626 (1979)

    CAS  Google Scholar 

  127. V. Baranauskas, C.I.Z. Mammana, R.E. Klinger, J.E. Greene: Appl. Phys. Lett. 36, 930 (1980)

    CAS  Google Scholar 

  128. G. Leyendecker, D. Bauerle, P. Geitner, H. Lydtin: Appl. Phys. Lett. 39, 921 (1981)

    CAS  Google Scholar 

  129. T.F. Deutsch, D.J. Ehrlich, R.M. Osgood: Appl. Phys. Lett. 35, 175 (1979)

    CAS  Google Scholar 

  130. T.F. Deutsch, D.J. Ehrlich, R.M. Osgood: Appl. Phys. Lett. 38, 1018 (1981)

    Google Scholar 

  131. T.F. Deutsch, D.J. Ehrlich, R.M. Osgood: Appl. Phys. Lett. 39, 957 (1981)

    Google Scholar 

  132. J. Electrochem. Soc.128, 2039 (1981)

    Google Scholar 

  133. R.S. Wagner, W.C. Ellis: Appl. Phys. Lett. 4, 89 (1964)

    CAS  Google Scholar 

  134. R.S. Wagner: “Growth of Crystals by the Vapour—Liquid—Solid Mechanism”, in Whisker Technology, ed. by A.P. Levitt ( Wiley, New York 1970 ) p. 47

    Google Scholar 

  135. G.A. Bootsma, H.J. Gassen: J. Cryst. Growth 10, 223 (1971)

    CAS  Google Scholar 

  136. E.I. Givargizov: “Growth of %!hiskers by the Vapour-Liquid-Solid Mechanism”, Current Topics Mat. Sci., Vol.1 ( North-Holland, Amsterdam 1978 ) p. 79

    Google Scholar 

  137. E.I. Givargizov, A.A. Chernov: Kristallografiya 18 147 (1973) [English transl.: Sov. Phys. Crystallogr.18, 89 (1973)]

    Google Scholar 

  138. E.I. Givargizov: J. Cryst. Growth 31, 20 (1975)

    CAS  Google Scholar 

  139. O. Nittono, H, Hasegawa, S. Nagakura: J. Cryst. Growth 42, 175 (1977)

    CAS  Google Scholar 

  140. R.R. Hasiguti, T. Ishibashi, H. Yumoto: J. Cryst. Growth 45, 13 (1978)

    CAS  Google Scholar 

  141. R.R. Hasiguti, H. Yumoto, Y. Kuriyama: J. Cryst. Growth 52, 135 (1981)

    CAS  Google Scholar 

  142. R.S. Wagner, W.C. Ellis: Trans. Metall. Soc. AIME 233, 1053 (1965)

    CAS  Google Scholar 

  143. E.N. Sickafus, D.B. Barker: J. Cryst. Growth 1, 93 (1967)

    Google Scholar 

  144. D. Nenov, E D Dukova: Krist. Tech. 7, 779 (1972)

    CAS  Google Scholar 

  145. R.S. Wagner: J. Cryst. Growth 3/4, 159 (1968)

    Google Scholar 

  146. C.Y. Lou, G.A. Somorjai: J. Chem. Phys. 55, 4554 (1971)

    CAS  Google Scholar 

  147. E.I. Givargizov, R.A. Babasyan: J. Cryst. Growth 37, 140 (1977)

    CAS  Google Scholar 

  148. E. Kaldis: “Liquid Layers on Vapour Grown Crystals”, in Crystal Growth and Characterization, ed. by R. Ueda, J.B. Mullin ( North-Holland, Amsterdam 1975 ) p. 225

    Google Scholar 

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  1. Institute of Crystallography, Academy of Sciences of the USSR, 59 Leninsky prospect, SU-117333, Moscow, USSR

    Professor Dr. Alexander A. Chernov

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  1. Professor Dr. Alexander A. Chernov
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Chernov, A.A. (1984). Growth from the Vapor Phase. In: Modern Crystallography III. Springer Series in Solid-State Sciences, vol 36. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-81835-6_8

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