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New Trends in Laser Processing of Semiconductors

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Optoelektronik in der Technik / Optoelectronics in Engineering

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Abstract

Semiconductor production has been an area where the laser has proved a useful and cost effective tool. Many hundred of laser systems have been used for wafer scribing and cutting.

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References

  1. B. Redlein, Quantronix, Operation Manual 2166-OM-l (unpublished).

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  2. Mardevich, A. Garcia, K. Eskenas Final Report, JPL Contract 954 853–1980.

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  3. Wells, J. Overbeck, and D. Smart, Proceedings Microelectronic Measurements Seminar, San Jose, CA, 1981.

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  4. Kuhn, S. Schuster, P.S. Zony, G.W. Lynch and J.T. Parrish, IEEE Journal of Solid State Circuits, Vol SC-10, p 219, 1975.

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  5. G.K. Celler, H.J. Leamy, D.E. Aspnes, J.C. Doherty, T.T. Sheng and L.E. Trimble. Proceedings of the Materials Research Society Annual Meeting, Boston, 1980.

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  6. R.R. Shah, G.A. Brown and R. Mays Jr., ibid.

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  7. G.L. Schnable and C.P. Wu, U.S. Patent No. 424 9960.

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Author information

Authors and Affiliations

  1. Applications Laboratory, Quantronix Corporation, Smithtown, New York, 11787, USA

    E. G. Arthurs

Authors
  1. E. G. Arthurs
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Editor information

Editors and Affiliations

  1. Universität München, Neuherberg, Germany

    Wilhelm Waidelich (o. Professor, Vorstand des Instituts für Medizinische Optik, Leiter der Abteilung Angewandte Optik der Gesellschaft für Strahlen- und Umweltforschung) (o. Professor, Vorstand des Instituts für Medizinische Optik, Leiter der Abteilung Angewandte Optik der Gesellschaft für Strahlen- und Umweltforschung)

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© 1982 Springer-Verlag Berlin, Heidelberg

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Arthurs, E.G. (1982). New Trends in Laser Processing of Semiconductors. In: Waidelich, W. (eds) Optoelektronik in der Technik / Optoelectronics in Engineering. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-81693-2_36

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  • DOI: https://doi.org/10.1007/978-3-642-81693-2_36

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-540-10969-3

  • Online ISBN: 978-3-642-81693-2

  • eBook Packages: Springer Book Archive

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