Die Herstellung von Halbleiterdetektoren

  • Harald Büker
Part of the Technische Physik in Einzeldarstellungen book series (TECHNISCHEPHYSI, volume 17)

Zusammenfassung

Über die Herstellungsverfahren von Halbleiterdetektoren ist eine Vielzahl von Arbeiten veröffentlicht worden. Im Rahmen dieses Buches kann auf die vorgeschlagenen Verfahren im einzelnen nicht näher eingegangen werden. Der interessierte Leser sei hier auf die entsprechenden Originalarbeiten verwiesen. Es sei in diesem Zusammenhang erwähnt, daß bei der Detektorherstellung oft Verfahren angewendet werden können, die aus der Transistortechnologie bekannt sind [4.1].

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Copyright information

© Springer-Verlag Berlin · Heidelberg 1971

Authors and Affiliations

  • Harald Büker
    • 1
  1. 1.Institut für ReaktorentwicklungKernforschungsanlage Jülich GmbHDeutschland

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