Problems of Quantitative Surface Composition Analysis Using LEIS

Abstract

Low Energy Ion Scattering (LEIS) is used to determine composition and structure of single crystal surfaces. The scattering event and the atomic exchange processes with the surface are complex events, however. A number of processes may affect the charged state of scattered particles, but in some cases where high surface layer specificity is desirable, the analysis would relate mainly to the ionised component of the scattered particle yield. In this paper we look at the factors important here. We present some detailed studies of inelastic loss processes which will affect quantitative analysis of surfaces.