Abstract
The limitation factors for sealed-off operation of excimer lasers are the loss of halogen (F2 or HCL), the built up of impurities in gas phase and the contamination of windows. The efforts of research and development in excimer laser technology in the last two years at Lambda Physik led to a new type of laser tube with longer gas lifetime, lower halogen consumption and reduced window contamination (Nova-Tube). This became possible by using selected materials inside the tube metal ceramic technology and improved discharge and preionisation technics.
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References
Messer Griesheim, Entwicklung Sondergase (1995)
G.M. Jursich et. al. Applied Optics Vol.31, No. 12 (1992)
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© 1996 Springer-Verlag Berlin Heidelberg
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Voß, F., Bäumler, J., Rebhan, U., Basting, D. (1996). Towards a Sealed-Off Excimer Laser. In: Waidelich, W., Hügel, H., Opower, H., Tiziani, H., Wallenstein, R., Zinth, W. (eds) Laser in Forschung und Technik / Laser in Research and Engineering. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-80263-8_6
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DOI: https://doi.org/10.1007/978-3-642-80263-8_6
Publisher Name: Springer, Berlin, Heidelberg
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