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Epioptics pp 39-76 | Cite as

Spectroscopic Ellipsometry

  • Uwe Rossow
Part of the Esprit Basic Research Series book series (ESPRIT BASIC)

Abstract

Ellipsometry dates back to the middle of the last century [1, 2], and it has been used since then for the determination of the optical properties of metals, semiconductors and insulators [3]. Ellipsometry is nowadays quite intensively employed in semiconductor characterisation and has the potential for in situ diagnostics of surfaces. The principle of ellipsometry is based on the fact that the status of light polarisation is changed when light is reflected from a surface. This change can be related to the dielectric function of the reflecting material, as discussed in Sect. 1.3.

Keywords

Dielectric Function Physical Review Spectral Position Spectroscopic Ellipsometry Group Versus Element 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© ECSC - EC - EAEC, Brussels - Luxembourg 1995

Authors and Affiliations

  • Uwe Rossow
    • 1
  1. 1.Institut für FestkörperphysikTechnische UniversitätGermany

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