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Analysis of Epitaxial Growth

  • Wolfgang Richter
  • Dietrich Zahn

Abstract

In the past, crystal growth and crystal characterisation were different topics performed in different laboratories by scientists from different disciplines. With the advent of epitaxial layer growth by Molecular Beam Epitaxy (MBE), Vapour Phase Epitaxy (VPE) and Liquid Phase Epitaxy (LPE) the two areas moved closer together since microscopic knowledge about the growth process turned out to be necessary in order to understand and to control the growth in a reproducible manner.

Keywords

Molecular Beam Epitaxy Epitaxial Growth Liquid Phase Epitaxy Vapour Phase Epitaxy Laser Doppler Anemometry 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin Heidelberg 1996

Authors and Affiliations

  • Wolfgang Richter
  • Dietrich Zahn

There are no affiliations available

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