Analysis of Epitaxial Growth
In the past, crystal growth and crystal characterisation were different topics performed in different laboratories by scientists from different disciplines. With the advent of epitaxial layer growth by Molecular Beam Epitaxy (MBE), Vapour Phase Epitaxy (VPE) and Liquid Phase Epitaxy (LPE) the two areas moved closer together since microscopic knowledge about the growth process turned out to be necessary in order to understand and to control the growth in a reproducible manner.
KeywordsMolecular Beam Epitaxy Epitaxial Growth Liquid Phase Epitaxy Vapour Phase Epitaxy Laser Doppler Anemometry
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