Fabrication of Quantum-Wire Structures by Atomic-Layer Epitaxy and VPE Processes
Growth-oriented process for fabricating quantum wire structure is presented, which can avoid complicated nano-scale lithography process and reduce process-induced defects. Chloride ALE, hydride VPE and in-situ selective gas etching are used here as main tools. The fabrication of T-shaped quantum wire structures is demonstrated.
KeywordsQuartz GaAs Hydride Trench AsH3
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