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Power Reduction of Excimer Lasers Caused by Electromagnetic Shock Waves Due to Repetitively Pulsed Discharge

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Shock Waves @ Marseille III

Abstract

It is well known that excimer lasers sometimes show output power reduction and instability at some pulse repetition frequencies. Although it is qualitatively pointed out that this phenomenon relates to the interaction between the repetitively pulsed glow discharges and the electromagnetic shock wave produced in the interelectrode region of the excimer laser, the detail mechanism of the phenomenon is not clearly explained. In this paper, the output power reduction corresponding to a certain exact shock position in the interelectrode region is investigated experimentally and a practical measure for shock dampening is proposed.

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References

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Author information

Authors and Affiliations

  1. Mitsubishi Heavy Industries, Ltd., Japan

    E. Hirai, N. Nagai & H. Yamakoshi

Authors
  1. E. Hirai
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  2. N. Nagai
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  3. H. Yamakoshi
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Editor information

Editors and Affiliations

  1. Centre Saint-Jérôme IUSTI-MHEQ, Case 321, Université de Provence, F-13397, Marseille Cedex 20, France

    Raymond Brun  & Lucien Z. Dumitrescu  & 

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© 1995 Springer-Verlag Berlin Heidelberg

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Hirai, E., Nagai, N., Yamakoshi, H. (1995). Power Reduction of Excimer Lasers Caused by Electromagnetic Shock Waves Due to Repetitively Pulsed Discharge. In: Brun, R., Dumitrescu, L.Z. (eds) Shock Waves @ Marseille III. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-78835-2_59

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  • DOI: https://doi.org/10.1007/978-3-642-78835-2_59

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-78837-6

  • Online ISBN: 978-3-642-78835-2

  • eBook Packages: Springer Book Archive

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