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Gas Source Molecular Beam Epitaxy pp 14–54Cite as

Chemistry

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Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 26))

Abstract

All crystal growth processes are basically chemical in nature, and understanding them depends upon understanding the chemistry that is determined both by the thermodynamic driving force for the processes to occur, and the kinetic relationships that define the rates at which they occur. These forces and relationships are not known in detail for the various molecular beam epitaxy methods, but sufficient information is available to provide considerable insight. A complete discussion of chemical thermodynamic relationships and the derivation of phase diagrams is beyond the scope of this book, and we will present various thermodynamic relationships as needed without derivation. Excellent discussions of the fundamentals of chemical thermodynamics are available in texts by Lewis et al. [2.1], Swalin [2.2], and Kubaschewski and Evans [2.3], among others.

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Authors and Affiliations

  1. AT&T Bell Laboratories, P.O. Box 636, 07974-0636, Murray Hill, NJ, USA

    Dr. Morton B. Panish & Dr. Henryk Temkin

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  1. Dr. Morton B. Panish
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© 1993 Springer-Verlag Berlin Heidelberg

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Panish, M.B., Temkin, H. (1993). Chemistry. In: Gas Source Molecular Beam Epitaxy. Springer Series in Materials Science, vol 26. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-78127-8_2

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  • DOI: https://doi.org/10.1007/978-3-642-78127-8_2

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