Design and Fabrication Considerations for Extending Integrated DC-SQUIDs to the Deep Sub-Micron Regime

  • M. B. Ketchen
Part of the Springer Proceedings in Physics book series (SPPHY, volume 64)


Over the past decade many groups around the world have successfully produced planar low-Tc dc SQUIDs with integrated input coils. While a number of dc SQUIDs with sub-μm junctions have been demonstrated, practical integrated dc SQUIDs have generally been fabricated with minimum lithographic features of 2–5μm. In this paper some of the important design and fabrication issues associated with scaling practical integrated dc SQUIDs to deep sub-μm dimensions are discussed.


Critical Current Density Minimum Feature Size Input Coil Energy Sensitivity Entire Wafer 
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Copyright information

© Springer-Verlag Berlin Heidelberg 1992

Authors and Affiliations

  • M. B. Ketchen
    • 1
  1. 1.IBM Research DivisionT.J. Watson Research CenterYorktown HeightsUSA

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