Characterization of YBaCuO Films Deposited by the Sputtering Method Using a Temple-Bell-Type Substrate Holder
The as-grown YBaCuO films deposited by the off-axis sputtering method using a temple-bell type substrate holder showed a good crystalline quality with a minimum yield value xmin of 0. 9MeV He ions 3.8%. The post-annealing degraded the crystalline quality to increase xmin up to 11.8%, though it improved both the Tc and Jc. It was supposed that the degradation was caused by the re-arrangement of oxygen atoms.
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