Analytical Calculation of the Resolution Correction Function for X-Ray Surface Structure Analysis at High Exit Angles

Abstract

The analysis of rod scans in surface x-ray diffraction provides information about structure parameters normal to the sample surface. In order to achieve high resolution the measurements have to extend to momentum transfers q_Z as large as possible. The proper correction of the measured intensity data for the resolution function of the detector is a prerequisite for obtaining reliable structure information. We have developed an analytical expression for the resolution correction of rod scan intensity data which take into account an anisotropic detector resolution T(θ,Ф), the domain size of the sample, ζ, and the primary beam divergence parallel to the sample surface Δτ.