Specular and Diffuse Scattering Studies of Multilayer Interfaces
The results of specular and diffuse x-ray scattering studies of multilayers are discussed. We show here that such studies can yield detailed statistical information about the interfacial roughness and morphology. Results on a GaAs/AlAs multilayer are presented and the data is analyzed within the Born approximation.
KeywordsCritical Angle Specular Reflectivity Born Approximation Interfacial Roughness Transverse Diffuse
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