Specular and Diffuse Scattering Studies of Multilayer Interfaces
The results of specular and diffuse x-ray scattering studies of multilayers are discussed. We show here that such studies can yield detailed statistical information about the interfacial roughness and morphology. Results on a GaAs/AlAs multilayer are presented and the data is analyzed within the Born approximation.
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- 3.S.K. Sinha, M.K. Sanyal, A. Gibaud, S.K. Satija, C.F. Majkrzak, and H. Homa, Proceedings of NATO Advanced Study Institute Conference in Crete, Greece, June 26–July 6, 1990.Google Scholar