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Specular and Diffuse Scattering Studies of Multilayer Interfaces

  • M. K. Sanyal
  • S. K. Sinha
  • A. Gibaud
  • S. K. Satija
  • C. F. Majkrzak
  • H. Homa
Part of the Springer Proceedings in Physics book series (SPPHY, volume 61)

Abstract

The results of specular and diffuse x-ray scattering studies of multilayers are discussed. We show here that such studies can yield detailed statistical information about the interfacial roughness and morphology. Results on a GaAs/AlAs multilayer are presented and the data is analyzed within the Born approximation.

Keywords

Critical Angle Specular Reflectivity Born Approximation Interfacial Roughness Transverse Diffuse 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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References

  1. 1.
    S.K. Sinha, E.B. Sirota, S. Gasoff and H.B. Stanley, Phys. Rev. B38, 2297 (1988).ADSGoogle Scholar
  2. 2.
    M.K. Sanyal, S.K. Sinha, K.G. Huang, and B.M. Ocko, Phys. Rev. Lett. 66, 628 (1991).ADSCrossRefGoogle Scholar
  3. 3.
    S.K. Sinha, M.K. Sanyal, A. Gibaud, S.K. Satija, C.F. Majkrzak, and H. Homa, Proceedings of NATO Advanced Study Institute Conference in Crete, Greece, June 26–July 6, 1990.Google Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 1992

Authors and Affiliations

  • M. K. Sanyal
    • 1
  • S. K. Sinha
    • 1
  • A. Gibaud
    • 1
  • S. K. Satija
    • 2
  • C. F. Majkrzak
    • 2
  • H. Homa
    • 3
  1. 1.Department of PhysicsBrookhaven National LaboratoryUptonUSA
  2. 2.National Institute of Standards and TechnologyUSA
  3. 3.Physics DepartmentBrooklyn College of CUNYUSA

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