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A Non-homogeneous Thin Film Model and the Evaluation of Its Properties by Ellipsometric Methods

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Surface Science

Part of the book series: Springer Proceedings in Physics ((SPPHY,volume 62))

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Abstract

A material produced by ion implantation or by chemical or mechanical action reveals a variable refraction index over its surface. This non-homogeneous thin film can be analyzed by ellipsometric method[l].

A model based on the generalization of Scandonne-Ballerine formulas and the variational method for estratified homogeneous thin films is proposed. Finally, the results are presented for effective complex index determination.

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References

  1. R.M.A. Azzam and N.M. Bashara, Ellipsometry andpolarized light (North-Holland Publishing Co., Amsterdam, 1977).

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  2. A.B. Rshanov, Ellipsometry: Research method of surfaces, in Russian (Nauka, Novosibirsk, 1983).

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  3. A.B. Rshanov, Ellipsometry: Theory, methods and applications, in Russian (Nauka, Novosibirsk, 1987).

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  4. A.B. Rshanov, Software and algorithms for the solution of problems in ellipsometry, in Russian (Nauka, Novosibirsk, 1980).

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  5. CA.P. Garnier and Y. Torres, II Encontro Latinoamericano sobre Laser e suas Aplicagoes (Niteroi R.J., Brasil, 1986).

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  6. C.A.P. Garnier y Y. Torres, Memorias XII Congreso Nacional de Física (Popayán, Colombia, 1987), p.30.

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  7. C.A.P. Garnier y Y. Torres, Memorias XII Congreso Nacional de Física (Popayán, Colombia, 1987), p. 39.

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Author information

Authors and Affiliations

  1. Departamento de Física, Laboratorio de Optica y Tratamiento de Señales, Universidad Industrial de Santander, A.A. 678, Bucaramanga, Colombia

    Y. Torres & A. Plata

Authors
  1. Y. Torres
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  2. A. Plata
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Editor information

Editors and Affiliations

  1. Xerox Corp., Palo Alto Research Center, 3333 Coyote Hill Road, 94304, Palo Alto, CA, USA

    Fernando A. Ponce

  2. Max-Planck-Institut für Festkörperforschung, Heisenbergstrasse 1, W-7000, Stuttgart 80, Fed. Rep. of Germany

    Manuel Cardona

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© 1992 Springer-Verlag Berlin Heidelberg

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Torres, Y., Plata, A. (1992). A Non-homogeneous Thin Film Model and the Evaluation of Its Properties by Ellipsometric Methods. In: Ponce, F.A., Cardona, M. (eds) Surface Science. Springer Proceedings in Physics, vol 62. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-76376-2_43

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  • DOI: https://doi.org/10.1007/978-3-642-76376-2_43

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-76378-6

  • Online ISBN: 978-3-642-76376-2

  • eBook Packages: Springer Book Archive

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