Chemical Information from Auger Electron Spectroscopy

  • J. Ferrón
  • R. Vidal
Conference paper
Part of the Springer Proceedings in Physics book series (SPPHY, volume 62)


We have analyzed refinements in the use of Auger electron spectroscopy to obtain chemical information. We introduce a novel form, the sequential way, of applying the principal component analysis (PCA) and target transformation (TT) methods. In conjunction with a novel form to analyze the experimental error, also based on PCA, we enhance the capability of PCA and TT for extracting the Auger line shape of unknown components. In order to show the capability of this method, we apply it to the study of the palladium crystalline and amorphous silicon interfaces.


Depth Profile Auger Electron Spectroscopy Amorphous Silicon Chemical Information Auger Spectrum 
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Copyright information

© Springer-Verlag Berlin Heidelberg 1992

Authors and Affiliations

  • J. Ferrón
    • 1
  • R. Vidal
    • 1
  1. 1.INTECUniversidad Nacional del Litoral and Consejo Nacional de Investigaciones Científicas y TécnicasSanta FeArgentina

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