Abstract
The growth processes of thin films have been studied extensively not only because they are important in technology, but also because it is scientifically important to understand the condensation kinetics from the atomistic point of view. Various kinds and degrees of atomic order have been observed in the experiments of vacuum-deposited thin films. These include the long range order with/without the translational symmetry in the atomic arrangements (crystal / quasicrystal), and the short range order (amorphous thin film). The aim of this paper is to study why these different types of atomic arrangements occur in the condensation processes.
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References
S. Ozawa and Y. Sasajima: to appear in Vacuum.
D.W. Heermann: Computer Simulation Methods in Theoretical Physics Springer-Verlag, Heidelberg (1986).
Y. Sasajima, H. Sugiyama and S. Ozawa: to be submitted to FORMA.
C.L. Henley: Phys. Rev. B34 (1986) 797.
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© 1990 Springer-Verlag Berlin Heidelberg
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Ozawa, S., Sasajima, Y., Haseda, T. (1990). Crystal Growth, Fractal Growth and Liquid-like Behavior in the Case of Thin Film Formation. In: Onuki, A., Kawasaki, K. (eds) Dynamics and Patterns in Complex Fluids. Springer Proceedings in Physics, vol 52. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-76008-2_38
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DOI: https://doi.org/10.1007/978-3-642-76008-2_38
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