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Single Crystal Growth of 6H-SiC by a Vacuum Sublimation Method, and Blue LEDs

  • T. Nakata
  • K. Koga
  • Y. Matsushita
  • Y. Ueda
  • T. Niina
Part of the Springer Proceedings in Physics book series (SPPHY, volume 43)

Abstract

Undoped inch-sized n-type single crystal ingots of 6H-SiC have been successfully fabricated, and degradation (emission color shift from blue to greenish-blue) of SiC blue LEDs prepared using off-angle substrates is effectively prevented.

Keywords

Carrier Concentration Epitaxial Layer Grown Crystal Seed Crystal Vacuum Sublimation 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer-Verlag Berlin Heidelberg 1989

Authors and Affiliations

  • T. Nakata
    • 1
  • K. Koga
    • 1
  • Y. Matsushita
    • 1
  • Y. Ueda
    • 1
  • T. Niina
    • 1
  1. 1.Semiconductor Research CenterSanyo Electric Co., Ltd.Hirakata, OsakaJapan

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