Single Crystal Growth of 6H-SiC by a Vacuum Sublimation Method, and Blue LEDs

  • T. Nakata
  • K. Koga
  • Y. Matsushita
  • Y. Ueda
  • T. Niina
Conference paper
Part of the Springer Proceedings in Physics book series (SPPHY, volume 43)

Abstract

Undoped inch-sized n-type single crystal ingots of 6H-SiC have been successfully fabricated, and degradation (emission color shift from blue to greenish-blue) of SiC blue LEDs prepared using off-angle substrates is effectively prevented.

Keywords

Nickel Quartz Graphite Carbide Photography 

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Copyright information

© Springer-Verlag Berlin Heidelberg 1989

Authors and Affiliations

  • T. Nakata
    • 1
  • K. Koga
    • 1
  • Y. Matsushita
    • 1
  • Y. Ueda
    • 1
  • T. Niina
    • 1
  1. 1.Semiconductor Research CenterSanyo Electric Co., Ltd.Hirakata, OsakaJapan

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