Preparation and Characterization of Amorphous SiC Film by a Liquid Route

Abstract

Advanced ceramics like carbides and nitrides can be obtained by the pyrolysis of metal-organic polymers. An intermediate amorphous phase is obtained after the removal of the organics and before crystallization. They can be considered as a new family of disordered materials called Amorphous Covalent Ceramics (ACC). By this polymer process, amorphous SiC films have been deposited on different substrates using metal-organic solutions with certain firing schedules. Some of the properties have been studied and compared with the previous data of a-SiC from vapor routes. The structural evolution has also been studied. By the liquid route, mixed carbides systems such as SiC/TiC, SiC/ZrC can be prepared by mixing polycarbosilane with alkoxides.