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Toxicological Investigations of Waste Products from the Plasma Etching Process in the Semiconductor Industry

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Recent Developments in Toxicology: Trends, Methods and Problems

Part of the book series: Archives of Toxicology ((TOXICOLOGY,volume 14))

Abstract

Plasma etching processes in the semiconductor industry are accompanied by the formation of waste products with potential toxicity. There is only limited knowledge about the occupational and environmental risks of these substances.

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References

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Author information

Authors and Affiliations

  1. Institute of Industrial Toxicology, Martin Luther University, Franzosenweg 1a, O-4020, Halle, Germany

    S. Bauer, I. Wolff, N. Werner, P. Hoffmann, K. Oemus & F.-W. Rath

  2. Microelectronic Industry, Rudolfstraße 10, O-5010, Erfurt, Germany

    R. Hillig & R. Voigt

  3. Research Centre of Microelectronics, Grenzstraße 28, O-8800, Dresden, Germany

    B. Merten

  4. Institute of Pathology, Martin Luther University, Leninallee 4, O-4020, Halle, Germany

    B. Merten

Authors
  1. S. Bauer
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  2. I. Wolff
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  3. N. Werner
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  4. P. Hoffmann
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  5. R. Hillig
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  6. R. Voigt
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  7. B. Merten
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  8. K. Oemus
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  9. F.-W. Rath
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Editor information

Editors and Affiliations

  1. Department of Pharmacology and Therapeutics, Trinity College, University of Dublin, Dublin 2, Ireland

    Philip L. Chambers  & Claire M. Chambers  & 

  2. Institut für Pharmakologie und Toxikologie, Universität Leipzig, Universitätsbereich Medizin, Härtelstraße 16-18, O-7010, Leipzig, Germany

    Wolf Diether Wiezorek

  3. Veterinärmedizinische Fakultät, Institut für Pharmakologie, Pharmazie und Toxikologie, Universität Leipzig, Zwickauer Straße 55, O-7010, Leipzig, Germany

    Siegfried Golbs

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© 1991 Springer-Verlag Berlin Heidelberg

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Cite this paper

Bauer, S. et al. (1991). Toxicological Investigations of Waste Products from the Plasma Etching Process in the Semiconductor Industry. In: Chambers, P.L., Chambers, C.M., Wiezorek, W.D., Golbs, S. (eds) Recent Developments in Toxicology: Trends, Methods and Problems. Archives of Toxicology, vol 14. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-74936-0_65

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  • DOI: https://doi.org/10.1007/978-3-642-74936-0_65

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-540-51422-0

  • Online ISBN: 978-3-642-74936-0

  • eBook Packages: Springer Book Archive

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