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Sputtering

  • Chapter
Computer Simulation of Ion-Solid Interactions

Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 10))

Abstract

Atomic bombardment of solids leads to removal of atoms from the target into free space. This sputtering process is the basis of secondary mass spectrometry, an experimental method of determining the target composition versus depth. In secondary ion mass spectrometry (SIMS) only the sputtered ions are used, whereas in secondary neutral mass spectrometry (SNMS) some fraction of the usually dominant neutral sputtered atoms are ionized in a low-density plasma for easier detection. Lasers can be applied to ionize nearly all sputtered neutral atoms or to select specific species.

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Eckstein, W. (1991). Sputtering. In: Computer Simulation of Ion-Solid Interactions. Springer Series in Materials Science, vol 10. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-73513-4_12

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