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Computer Simulation of Ion-Solid Interactions pp 142–168Cite as

Backscattering

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Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 10))

Abstract

Backscattering of projectiles from solid targets has many applications. In Rutherford backscattering (RBS) it is used as an analytical tool with projectile energies from about 100 keV to the MeV region for the analysis of the first 500 nm of a solid, while in ion surface spectrometry (ISS) it is used for investigations of processes at the topmost layer of a solid with projectile energies around 1 keV.

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Eckstein, W. (1991). Backscattering. In: Computer Simulation of Ion-Solid Interactions. Springer Series in Materials Science, vol 10. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-73513-4_11

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