Skip to main content

Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 10))

  • 579 Accesses

Abstract

Range calculations were among the first applications of computer simulations of the projectile—solid interaction [10.1–6]. Whereas the first calculations were motivated by radiation damage problems, interest has shifted in recent years to implantation. This explains why the majority of publications deal with silicon; it is regarded from mainly a materials engineering point of view. Another topic is radiation damage, especially near the surface. The occurrence of blistering, caused mainly by helium bombardment of metals, triggered some publications. The topic is of some importance in the plasma-wall interaction for future fusion reactors. Other papers attempted to compare the simulated results with those of an analytical approach. Probably the most important benefit of computer simulation was the discovery of channelling by Robinson and Oen [10.2–5]. This effect explained the deeper penetration of light projectiles in single crystals measured at about the same time by Davies et al. [10.7–9]. Simulations were performed for comparison with experimental data and to develop formulae for the ranges of projectiles in solids.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 84.99
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 109.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. M.M. Bredov, I.G. Lang, N.M. Okuneva: Zh. Tekh. Fiz. 28, 252 (1958) [Sov. Phys.-Tech. Phys. 3, 228 (1958)]

    Google Scholar 

  2. M.T. Robinson, D.K. Holmes, O.S. Oen: In Le Bombardement lonique ( CNRS, Paris 1962 ) p. 105

    Google Scholar 

  3. O.S. Oen, D.K. Holmes, M.T. Robinson: J. Appi. Phys. 34, 302 (1963)

    ADS  Google Scholar 

  4. M.T. Robinson, O.S. Oen: Appi. Phys. Lett. 2, 30 (1963)

    ADS  Google Scholar 

  5. M.T. Robinson, O.S. Oen: Phys. Rev. 132, 2385 (1963)

    ADS  Google Scholar 

  6. O.S. Oen, M.T. Robinson: J. Appi. Phys. 35, 2515 (1964)

    ADS  Google Scholar 

  7. J.A. Davies, J. Friesen, J.D. Mclntyre: Can. J. Chem. 38, 1526 (1960)

    Google Scholar 

  8. J.A. Davies, J.D. Mclntyre, RL. Cushing, M. Launsbury: Can. J. Chem. 38, 1535 (1960)

    Google Scholar 

  9. J.A. Davies, G.A. Sims: Can. J. Chem. 39, 601 (1961)

    Google Scholar 

  10. M.T. Robinson: Private communication (1988)

    Google Scholar 

  11. M. Zelai, N.C. Severo: In Handbook of Mathematical Functions, ed. by M. Abramowitz, I.A. Stegun ( NBS, Washington, DC 1970 ) p. 925

    Google Scholar 

  12. D.E. Harrison, Jr., R.W. Leeds, W.L. Gay: J. Appi. Phys. 36, 3154 (1965)

    ADS  Google Scholar 

  13. D.E. Harrison, Jr., D.S. Greiling: J. Appi. Phys. 38, 3200 (1967)

    ADS  Google Scholar 

  14. V.A. Eltekov, D.S. Karpuzov, Yu.V. Martynenko, V.E. Yurasova: In Atomic Collision Phe-nomena in Solids, ed. by D.W. Palmer, M.W. Thompson, PX. Townsend ( North-Holland, Amsterdam 1970 ) p. 657

    Google Scholar 

  15. V.A. Eltekov, D.S. Karpuzov, Yu.V. Martynenko, E.A. Rubakha, V.A. Simonov, V.E. Yurasova: Radiat. Eff. 13, 237 (1972)

    Google Scholar 

  16. V.A. Eltekov, D.S. Karpuzov, Yu.V. Martynenko, E.A. Rubakha, VA. Simonov, V.E. Yurasova: In Atomic Collisions in Solids TV, ed. by S. Andersen, K. Björkquist, B. Domeij, N.G.E. Johansson ( Gordon and Breach, London 1972 ) p. 113

    Google Scholar 

  17. MM. Jakas, D.E. Harrison, Jr.: Nucl. Instrum. Methods B14, 535 (1986)

    ADS  Google Scholar 

  18. M.H. Shapiro, T.A. Tombrello: Nucl. Instrum. Methods B18, 355 (1987)

    Google Scholar 

  19. M.T. Robinson, K. Rössler, I.M. Torrens: J. Chem Phys. 60, 680 (1974)

    ADS  Google Scholar 

  20. O.S. Oen, M.T. Robinson: Inst. Phys. Const. Ser. 28, 329 (1976)

    Google Scholar 

  21. U. Littmark, G. Maderlechner, R. Behrisch, B.M.U. Scherzer: Nucl. Instrum. Methods 132, 661 (1976)

    ADS  Google Scholar 

  22. G. Maderlechner: IPP-Report 9/20, Garching, (1976)

    Google Scholar 

  23. TJ. Hoffman, M.T. Robinson, H.L. Dodds, Jr.: J. Nucl Mater. 85, 86, 597 (1979)

    Google Scholar 

  24. J.B. Roberto, M.T. Robinson: J. Appi. Phys. 51, 4589 (1980)

    ADS  Google Scholar 

  25. M.T. Robinson: J. Nucl. Mater. 103, 104, 525 (1981)

    Google Scholar 

  26. G.E. Thomas, LJ. Beckers, J J. Vrakking, B.R. De Koning: J. Cryst. Growth 56, 557 (1982)

    ADS  Google Scholar 

  27. W. Möller, W. Eckstein: Nucl. Instrum. Methods 194, 121 (1982)

    Google Scholar 

  28. R. Benedek, K.L. Merkle: Radiat. Eff. 60, 85 (1982)

    Google Scholar 

  29. O.S. Oen: Nucl. Instrum. Methods B 13, 495 (1986)

    ADS  Google Scholar 

  30. HJ. Kang, R. Shimizu, T. Saito, H. Yamakawa: J. Appi. Phys. 62, 2733 (1987)

    ADS  Google Scholar 

  31. G.P. Mueller, M. Rosen, W.A. Fraser, J.A. Sprague, P.R. Malmberg, J.M. Lambert, P.A. Treado, G.W. Reynolds: Nucl. Instrum. Methods B18, 360 (1987)

    Google Scholar 

  32. Y. Kimura, HJ. Kang, R. Shimizu: Jpn. J. Appi. Phys. 27, L444 (1988)

    ADS  Google Scholar 

  33. K. Oura, T. Kojima, F. Shoji, T. Hanawa: Nucl. Instrum. Methods B 37 /38, 975 (1989)

    ADS  Google Scholar 

  34. J.P. Biersack, W. Kaczerowski, J. Ney, B.K.H. Rahim, A. Riccato, G.R. Thacker, H. Uecker: J. Nucl. Mater. 76 /77, 640 (1978)

    ADS  Google Scholar 

  35. J JB. Biersack, D. Fink, R.A. Henkelmann, K. Müller: J. Nucl. Mater. 85 /86, 1165 (1979)

    ADS  Google Scholar 

  36. W. Eckstein, H. Verbeek, J.P. Biersack: J. Appi. Phys. 51, 1194 (1980)

    ADS  Google Scholar 

  37. J.P. Biersack, L.G. Haggmark: Nucl. Instrum. Methods 174, 257 (1980)

    ADS  Google Scholar 

  38. W. Eckstein: IPP-Report 9/33, Garching, (1980)

    Google Scholar 

  39. J.P. Biersack: In Ion Implantation Techniques, ed. by H. Ryssel, H. Glawischnig, Springer Ser. Electrophys., Vol. 10 ( Springer, Berlin, Heidelberg 1982 ) p. 122

    Google Scholar 

  40. D. Fink, JP. Biersack, M. Städele, K. Tjan, V.K. Cheng: Nucl. Instrum. Methods 218, 171 (1983)

    Google Scholar 

  41. D. Fink, JP. Biersack, M. Städele, K. Tjan, V.K. Cheng: Nucl. Instrum. Methods 218, 817 (1983)

    Google Scholar 

  42. W. Eckstein: IPP-Report 9/43, Garching,(1983)

    Google Scholar 

  43. M. Behar, Ji. Biersack, P.F.P. Fichtner, D. Fink C.V. de B. Leite Filho, C.A. Olivieri, B.K. Patnaik, J.P. de Souza, F.C. Zawislak: Radiat. Eff. Lett. 85, 117 (1984)

    Google Scholar 

  44. G.M. Mladenov, M. Braun, B. Emmoth, J.P. Biersack: J. Appl. Phys. 58, 2534 (1985)

    ADS  Google Scholar 

  45. J.F. Ziegler, JP. Biersack, U. Littmark: In The Stopping and Range of Ions in Solids, The Stopping and Range of Ions in Matter, Vol. 1, ed. by J.F. Ziegler ( Pergamon, New York 1985 )

    Google Scholar 

  46. N. Herbots, B.R. Appleton, T.S. Noggle, R.A. Zuhr, S J. Pennycook: Nucl. Instrum. Methods 13, 250 (1986)

    Google Scholar 

  47. H. Gnaser, H.L. Bay, W.O. Hofer: Nucl. Instrum. Methods B 15, 49 (1986)

    ADS  Google Scholar 

  48. P.F.P. Fichtner, M. Behar, C.A. Olivieri, RP. Livi, JP de Souza, F.C. Zawislak, D. Fink, J.P. Biersack: Radiat. Eff. Lett. 87, 191 (1986)

    Google Scholar 

  49. DM. Danailov, D.S. Karpuzov: Bulg. J. Phys. 14, 439 (1987)

    Google Scholar 

  50. P.L. Grande, P.F.P. Fichtner, M. Behar, R.P. Livi, F.C. Zawislak, J.P. Biersack, D. Fink, P. Mertens: Nucl. Instrum. Methods B19 /20, 25 (1987)

    Google Scholar 

  51. PP. Sanchez, D. Fink, P.F.P. Fichtner, J.P. Biersack: Nucl. Instrum. Methods B 19 /20, 28 (1987)

    Google Scholar 

  52. J.P. Biersack: Nucl. Instrum. Methods B 19 /20, 32 (1987)

    Google Scholar 

  53. H. Ryssel, W. Krüger, J. Lorenz: Nucl. Instrum. Methods B 19 /20, 40 (1987)

    Google Scholar 

  54. H. Ryssel, J. Lorenz, W. Krüger: Nucl. Instrum. Methods B 19 /20, 45 (1987)

    Google Scholar 

  55. M. Weiser, M. Behar, S. Kalbitzer, P. Oberschachtsiek, D. Fink, G. Freeh: Nucl. Instrum. Methods B 29, 587 (1987)

    ADS  Google Scholar 

  56. D. Fink, J.P. Biersack, PP. Sanchez, P.F.P. Fichtner: Radiat. Eff. 103, 89 (1987)

    Google Scholar 

  57. D. Fink, J.P. Biersack, M. Städele, V.K. Cheng: Radiat. Eff. 104, 1 (1987)

    Google Scholar 

  58. P.L. Grande, P.F.P. Fichtner, M. Behar, F.C. Zawislak: Nucl. Instrum. Methods B33, 122 (1988)

    Google Scholar 

  59. P.L. Grande, P.F.P. Fichtner, M. Behar, F.C. Zawislak: Nucl. Instrum. Methods B 35, 17 (1988)

    ADS  Google Scholar 

  60. D. Fink, JP. Biersack, H. Kranz, J. de Souza, M. Behar, F.C. Zawislak: Nucl. Instrum. Methods B106, 165 (1988)

    Google Scholar 

  61. W. Möller: E-MRS88 27, L444 (1988)

    Google Scholar 

  62. W. Möller: Mato. Sei. Eng. B2, 21 (1989)

    Google Scholar 

  63. U. Bussmann, PP.L. Hemment: Nucl. Instrum. Methods B 47, 22 (1990)

    ADS  Google Scholar 

  64. H.I. Budinov, D.S. Karpuzov: Nucl. Instrum. Methods B 47, 33 (1990)

    ADS  Google Scholar 

  65. M. Hautala: Nucl. Instrum. Methods 218, 799 (1983) N10.66M. Hautala: Nucl. Instrum. Methods 2, 130 (1984)

    Google Scholar 

  66. M. Hautala: Phys. Rev. B30, 5010 (1984)

    ADS  Google Scholar 

  67. M. Hautala, A. Anttila, J. Hirvonen: Nucl. Instrum. Methods B19 /20, 50 (1987)

    Google Scholar 

  68. M. Hautala, I. Koponen: Nucl. Instrum. Methods B28, 237 (1987)

    Google Scholar 

  69. M. Hautala, R. Lappalainen: Nucl. Instrum. Methods B28, 519 (1987)

    Google Scholar 

  70. I. Koponen, M. Hautala: Nucl. Instrum. Methods B33, 112 (1988)

    Google Scholar 

  71. P. Tikkanen: Nucl. Instrum. Methods B36, 103 (1989)

    Google Scholar 

  72. H. Lutz, R. Schuckert, R. Sizmann: Nucl. Instrum. Methods 38, 241 (1965)

    ADS  Google Scholar 

  73. P.V. Pavlov, D.I. Tetel’baum, E.I. Zorin, V.I. Alekseev: Fiz. Tverd. Tela 8, 2679 (1966) [Sov. Phys.-Solid State 8, 2141 (1967)]

    Google Scholar 

  74. D.S. Strizhenov, Yu.A. Ryzhov, B.M. Kalmykov: Izv. Akad. Nauk USSR, Ser. Fiz. 35, 398 (1971)

    Google Scholar 

  75. E.M. Zarutskii: Zh. Tekh. Fiz. 40, 2046 (1970) [Sov. Phys.-Tech. Fiz. 15, 1594 (1971)]

    Google Scholar 

  76. V.M. Lenchenko, YuZ. Akilov: Dokl. Akad. Nauk. SSSR 203,315 (1972) [Sov. Rhys.-Dokl. 17, 232 (1972)]

    Google Scholar 

  77. T. Ishitani, R. Shimizu, K. Murata: Jpn. J. Appi. Phys. 11, 125 (1972)

    ADS  Google Scholar 

  78. T. Ishitani, R. Shimizu, K. Murata: Phys. Status Solidi 50, 681 (1972)

    Google Scholar 

  79. G. Betz: Z. Naturforsch. 27a, 1239 (1972)

    ADS  Google Scholar 

  80. J.E. Robinson, S. Agamy: In Atomic Collision Phenomena in Solids, ed. by S. Datz, B.R. Appleton, C.D. Moak ( Plenum, New York 1975 ) p. 215

    Google Scholar 

  81. A. Desalvo, R. Rosa: Radiat. Eff. 31, 41 (1976)

    Google Scholar 

  82. R. Shimizu, S.T. Kang, T. Koshikawa, H. Ogata, K. Kanayama, Y. Ogata, Y. Agasaka, K. Horie: J. Appi. Phys. 48, 1745 (1977)

    ADS  Google Scholar 

  83. A. Nomura, S. Kiyono: Jpn. J. Appi. Phys. 16, 2245 (1977)

    ADS  Google Scholar 

  84. J. Tatarkiewicz: Nucl. Instrum. Methods 146, 447 (1977)

    ADS  Google Scholar 

  85. R. Shimizu: Proc. 7th Int. Vac. Cong, and 3rd Int. Conf. Solid Surfaces, by R. Do-brozemsky, F. Rudenauer, F.P. ViehbOck, A. Breth (R. Dobrozemsky, Vienna 1977 ) p. 1417

    Google Scholar 

  86. J. Kleinonen, M. Hautala, M. Luomajàrvi, A. Anttila, M. Bister: Radiat. Eff. 39, 189 (1978)

    Google Scholar 

  87. M. Bister, M. Hautala, M. Jàntti: Radiat. Eff. 42, 201 (1979)

    Google Scholar 

  88. A. Desalvo, R. Rosa: Radiat. Eff. 47, 117 (1980)

    Google Scholar 

  89. G. Abel, G. Ross, B. Terreault, J.P. Labrie: Nucl. Instrum. Methods 170, 171 (1980)

    ADS  Google Scholar 

  90. M. Hautala: Radiat. Eff. 51, 35 (1980)

    Google Scholar 

  91. I. Adesida, L. Karapiperis: Radiat. Eff. 61, 223 (1982)

    Google Scholar 

  92. A. Desalvo, R. Rosa: Radiat. Eff. 67, 119 (1982)

    Google Scholar 

  93. Y. Miyagawa, S. Miyagawa: J. Appi. Phys. 54, 7124 (1983)

    ADS  Google Scholar 

  94. T. Ishitani, A. Shimase, S. Hosaka: Jpn. J. Appi. Phys. 22, 329 (1983)

    ADS  Google Scholar 

  95. P.S. Chou, N.M. Ghoniem: J. Nucl. Mater. 117, 55 (1983)

    ADS  Google Scholar 

  96. W. Takeuchi, Y. Yamamura: Radiat. Eff. 71, 53 (1983)

    Google Scholar 

  97. S. Kostic, J J. Jimenez-Rodriguez, D.S. Karpuzov, D.G. Armour, G.Carter: Nucl. Instrum. Methods B2, 182 (1984)

    ADS  Google Scholar 

  98. AM. Mazzone, G. Rocca: IEEE Trans. Computer-Aided Design 3, 64 (1984)

    Google Scholar 

  99. M. Hautala, J. Kleinonen, HJ. Whitlow, P. Tikkanen, M. Uhrmacher, K.P. Lieb: Phys. Lett. 109A, 344 (1985)

    Google Scholar 

  100. J. Sielanko, W. Szyszko: Surf. Sci. 161, 101 (1985)

    ADS  Google Scholar 

  101. C.M. Davisson: Nucl. Instrum. Methods B13, 421 (1986)

    Google Scholar 

  102. J. Sielanko, W. Szyszko: Nucl. Instrum. Methods B16, 340 (1986)

    Google Scholar 

  103. M. Posselt, W. Skorupa: Nucl. Instrum. Methods B21, 8 (1987)

    Google Scholar 

  104. MJ. Tejwani, P. Riemenschneider: Nucl. Instrum. Methods B21, 471 (1987)

    Google Scholar 

  105. R. Becerra-Acevedo, B. Terreault: Nucl. Instrum. Methods B28, 1 (1987)

    Google Scholar 

  106. Y. Yamamura: Nucl. Instrum. Methods B28, 17 (1987)

    Google Scholar 

  107. Y. Miyagawa, S. Miyagawa: Nucl. Instrum. Methods B28, 27 (1987)

    Google Scholar 

  108. P.S. Chou, N.M. Ghoniem: Nucl. Instrum. Methods B28, 175 (1987)

    Google Scholar 

  109. T.S. Pugacheva, M.S. Saidov, A.S. Lutovich: Radiat. Eff. 105, 117 (1987)

    Google Scholar 

  110. T. Kato, H. Morimoto, H. Onada, T. Kato: Nucl. Instrum. Methods B30, 44 (1988)

    Google Scholar 

  111. Y. Kido, N. Suzuki, J. Kawamoto: Nucl. Instrum. Methods B33, 681 (1988)

    Google Scholar 

  112. S.T. Nakagawa, Y. Yamamura: Nucl. Instrum. Methods B33, 780 (1988)

    Google Scholar 

  113. S.T. Nakagawa, Y. Yamamura: Radiat. Eff. 105, 239 (1988)

    Google Scholar 

  114. A. Schònborn, N. Hecking, E.H. TeKaat: Nucl. Instrum. Methods B43, 170 (1989)

    Google Scholar 

  115. A. Desalvo, R. Rosa, F. Zignani: Lett. Nuovo Cimento 2, 390 (1971)

    Google Scholar 

  116. A. Desalvo, R. Rosa, F. Zignani: J. Appi. Phys. 43, 3755 (1972)

    ADS  Google Scholar 

  117. DJ. Bierman, D. van Vliet: Physica 57, 221 (1972)

    ADS  Google Scholar 

  118. A. Desalvo, R. Rosa, F. Zignani: Radiat. Eff. 27, 89 (1975)

    Google Scholar 

  119. T. Barbazsewski: Radiat. Eff. 79, 131 (1983)

    Google Scholar 

  120. F. Garofalo, A.M. Mazzone: Phys. Status Solidi 98, 517 (1986)

    ADS  Google Scholar 

  121. AM. Mazzone, M. Servidori, F. Cembali: Radiat. Eff. Lett. 87, 169 (1986)

    Google Scholar 

  122. T. Saito, H. Yamakawa, S. Komiya, HJ. Kang, R. Shimizu: Nuel. Instrum. Methods B21, 456 (1987)

    Google Scholar 

  123. Y. Yamamura, W. Takeuehi: Nuel. Instrum. Methods B29, 461 (1987)

    ADS  Google Scholar 

  124. A.M. Mazzone: Philos. Mag. Lett. 55, 235 (1987)

    ADS  Google Scholar 

  125. A.M. Mazzone: Nuel. Instrum. Methods B34, 22 (1988)

    ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

Copyright information

© 1991 Springer-Verlag Berlin Heidelberg

About this chapter

Cite this chapter

Eckstein, W. (1991). Ranges. In: Computer Simulation of Ion-Solid Interactions. Springer Series in Materials Science, vol 10. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-73513-4_10

Download citation

  • DOI: https://doi.org/10.1007/978-3-642-73513-4_10

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-73515-8

  • Online ISBN: 978-3-642-73513-4

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics