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On the Use of Electron Microscopy in the Study of Semiconductor Interfaces

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Semiconductor Interfaces

Part of the book series: Springer Proceedings in Physics ((SPPHY,volume 22))

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Abstract

The electron microscope is, by essence, ideally suited to the study of localised microstructures such as interfaces. Formally, this is because the phase information of the electron waves scattered by the specimen is maintained in the formation of the image (e.g. see /l/).

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© 1987 Springer-Verlag Berlin Heidelberg

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Chevalier, JP. (1987). On the Use of Electron Microscopy in the Study of Semiconductor Interfaces. In: Le Lay, G., Derrien, J., Boccara, N. (eds) Semiconductor Interfaces. Springer Proceedings in Physics, vol 22. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-72967-6_9

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  • DOI: https://doi.org/10.1007/978-3-642-72967-6_9

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-72969-0

  • Online ISBN: 978-3-642-72967-6

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