Abstract
Since its first introduction by SMITH /1/ low-energy ion scattering has developed into a well-established method for investigating the composition and structure of solid surfaces. The specific features of the method lie in its sensitivity to the atomic masses in the topmost layer of a surface and in the capability to analyse the positions of these atoms relative to each other, i.e. to characterize the local atomic arrangement /2/.
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© 1987 Springer-Verlag Berlin Heidelberg
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Taglauer, E. (1987). Surface Characterization by Low-Energy Ion Scattering. In: Le Lay, G., Derrien, J., Boccara, N. (eds) Semiconductor Interfaces. Springer Proceedings in Physics, vol 22. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-72967-6_14
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DOI: https://doi.org/10.1007/978-3-642-72967-6_14
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