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A 10keV X-ray Microprobe with Grazing Incidence Mirrors

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X-ray Microscopy

Abstract

An x-ray microprobe has been expected to be a promising analytical tool for spectroscopic and structural studies of the elemental constitution of matters with spatial resolution (Sparks, 1980). Detectable signals are fluorescent x-rays, photoelectrons, EXAFS and so on. Although these signals are examined rigorously in the spectroscopic study, only a few experiments on micro-analysis have been reported (Horowitz and Howell, 1972).

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© 1987 Springer-Verlag Berlin Heidelberg

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Aoki, S., Gohshi, Y., Iida, A. (1987). A 10keV X-ray Microprobe with Grazing Incidence Mirrors. In: Cheng, Pc., Jan, Gj. (eds) X-ray Microscopy. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-72881-5_19

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  • DOI: https://doi.org/10.1007/978-3-642-72881-5_19

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-72883-9

  • Online ISBN: 978-3-642-72881-5

  • eBook Packages: Springer Book Archive

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