Advertisement

Image Analysis for Micro- and Macrostructure Measurement

  • H. J. Tiziani
Part of the Informatik aktuell book series (INFORMAT)

Abstract

Interferometric metrology, confocal microscopy, triangulation and Moiré techniques are well introduced. Furthermore, the detection of defects can be a powerful tool. Computer based analysis is essential as well as new technology and components. The market for shape, defects, deviation or position measurement is continuously growing. High frame rate and high flexibility are needed. Matrix liquid crystal displays (LCD), both electrically or optically addressed are able to display gray values. Digital micromirror devices (DMD) are a basis to lead to a couple of new applications. LCDs enable a instantaneous adjustment of the projection brightness. Both confocal microscopy and white light interferometry are image plane localisating methods. These are of advantage for high resolution microscopic and macroscopic measurements and to determine the shape of rough technical surfaces. Optically addressed crystals enable new possibilities in analog real time image processing. They are able to detect defects in periodic media and microstructures just by using polarization properties. This is of major interest in microelectronic manufacturing today and even more in the near future.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

Literature

  1. 1.
    Tiziani, H.-J.: “Optical metrology of engineering surfaces: scope and trends,” in Optical Measurement Techniques and Applications, P.K. Rastogi, ed. ( Artech House, Boston, 1997 ).Google Scholar
  2. 2.
    Windecker, R., Tiziani, H.-J.: „Topometry of technical and biological objects by fringe projection“, Applied Optics, Vol. 34, No. 19, July 1995, pp. 3664CrossRefGoogle Scholar
  3. 3.
    Schönleber, M., Tiziani, H.-J.: „Fast and flexible shape control with adaptive LCD fringe masks“, Proc. SPIE 3098, 35–42 (1997)CrossRefGoogle Scholar
  4. 4.
    Haist, T., Tiziani, H.-J.: „Fast positioning of non-cooperative objects“, Proc. SPIE 3098, 424–430 (1997)CrossRefGoogle Scholar
  5. 5.
    Schönleber, M., Wagemann, E.U., Tiziani, H.J.: „Shape deviation measurement with enhanced depth using adapted fringe projection and multiple exposed holograms“, Proc. ISATA, 2.–5. June 1998, DüsseldorfGoogle Scholar
  6. 6.
    Leonhardt, U. Droste and H.J. Tiziani: „ Microshape and rough surface analysis by fringe projection“, Applied Optics, 33 (1994), 7477–7488.CrossRefGoogle Scholar
  7. 7.
    Leonhardt, K., Jordan, H.-J., Tiziani, H.-J.: „Micro-Ellipso-Height- Profilometry“, Optics Communications, 80 (1991), 205–209.CrossRefGoogle Scholar
  8. 8.
    Tiziani, H.-J., Achi, R., Krämer, R.N.: “Chromatic confocal microscopy with microlenses”. Journal of Modern Optics 43 (1996) 155–163CrossRefGoogle Scholar
  9. 9.
    Tiziani, H.-J., Achi, R., Krämer, R.N., Wiegers, L.: “Theoretical analysis of confocal microscopy with microlenses”, Appl. Opt. 35 (1996) 120–125Google Scholar
  10. 10.
    Hessler T., Rossi M., Pedersen, J., Gale M. T., Wegner, M., Steudle, D., Tiziani H. J.: „Microlens arrays with spatial variation of the optical functions“, Pure & Applied Optics 6, pp. 673–681 (1997)CrossRefGoogle Scholar
  11. 11.
    Windecker, R., Haible, P., Tiziani, H.J. „Fast coherence scanning interferometry for measuring smooth, rough and spherical surfaces“, Journal of Modern Optics, 1995, Vol. 42, No. 10, 2059–2069.CrossRefGoogle Scholar
  12. 12.
    Windecker, R., Fleischer, M., Franze, B., Tiziani, H.J.: „Two methods for fast coherence tomography and topometry“, Journal of Modern Optics, Vol. 44, Nr. 5, 1997, 967–977.CrossRefGoogle Scholar
  13. 13.
    Wagemann, E.U., Tiziani, H.J.: “Spatial self-filtering using photorefractive and liquid crystals”, Journal of Modern Optics, in print, 1998Google Scholar
  14. 14.
    Wagemann, E.U., Tiziani, H.J.: “Real time defect detection in video images”, Proc. OPTO 98, 18.–20. May 1998, ErfurtGoogle Scholar

Copyright information

© Springer-Verlag Berlin Heidelberg 1998

Authors and Affiliations

  • H. J. Tiziani
    • 1
  1. 1.Institut für Technische OptikUniversität StuttgartGermany

Personalised recommendations