Skip to main content

Concept and Design of the SMART Spectromicroscope at BESSY II

  • Chapter
X-Ray Microscopy and Spectromicroscopy

Abstract

The concept of a new spectromicroscope (SMART = spectromicroscope for all relevant techniques) currently under construction for an undulator beam line at BESSY II is discussed. The design of the optical system is described as well as the modes of operation and the experiments that can be performed. Monochromatic XUV-radiation (tunable within the energy range 20 to 2000 eV) will be provided by a planegrating monochromator and focussed onto the sample by means of an ellipsoidal mirror. In addition, an electron gun will be installed allowing LEEM, MEM and other forms of microscopy as well as small spot LEED to be performed. With an aberration corrector we expect to achieve a lateral resolution better than 5 nm and to increase considerably the transmission of the optical system compared to previous instruments. An imaging band pass filter corrected to second order will select the energy and the energy band width for the image-forming electrons. The instrument will also allow spectroscopy of photoelectrons from selected small areas of the sample (5–500 nm) with an energy resolution of 0.1 eV.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 39.99
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 54.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. G. Lilienkamp, Th. Schmidt, C. Koziol, and E. Bauer, BESSY Annual Report 1994, p. 469.

    Google Scholar 

  2. E. Bauer, T. Franz, C. Koziol, G. Lilienkamp, and T. Schmidt, in Chemical, Structuml and Electronic Analysis of Heterogenous Surfaces on the Nanometer Scale edited by R. Rosei (Kluwer Academic Publishing; Dordrecht), in press.

    Google Scholar 

  3. J.D. Denlinger, E. Rotenberg, T. Warwick, G. Visser, J. Nordgren, J.-H. Guo, P. Skytt, S.D. Kevan, K.S. McCutcheon, D. Shuh, J. Bucher, N. Edelstein, J.G. Tobin, and B.P. Tonner, Rev. Sci. Instrum. 66, 1342 (1995).

    Article  ADS  Google Scholar 

  4. J. Welnak, Z. Dong, H. Solak, J. Wallace, F. Cerrina, M. Bertolo, A. Bianco, S. Di Fronzo, S. Fontana, W. Jark, F. Mazzolini, R. Rosei, A. Savoia, J.H. Underwood, and G. Margaritondo, Rev. Sci. Instrum. 66, 2273 (1995).

    Article  ADS  Google Scholar 

  5. E. Umbach, Physica B 208-209, 193 (1995).

    Google Scholar 

  6. B.P. Tonner, D. Dunham, T. Droubay, J. Kikuma, J. Denlinger, E. Rotenberg, and A. Warwick, J. Electron Spectrosc. ReI. Phen. 75, 309 (1995).

    Article  Google Scholar 

  7. R. Fink, M.R. Weiss, E. Umbach, D. Preikszas, H. Rose, R. Spehr, P. Hartel, W. Engel, R. Degenhardt, R. Wichtendahl, H. Kuhlenbeck, W. Erlebach, K. Ihmann, R. Schlagl, H.-J. Freund, A.M. Bradshaw, G. Lilienkamp, Th. Schmidt, E. Bauer, and. G. Benner, J. Electron Spectrosc. ReI. Phen. 84, 231 (1996).

    Article  Google Scholar 

  8. H. Rose and D. Preikszas, Optik 92, 31 (1992).

    Google Scholar 

  9. E. Bauer, Ultramicroscopy 36, 52 (1991).

    Article  Google Scholar 

  10. D. Preikszas, Ph. D. Dissertation D 17, TH Darmstadt (1995).

    Google Scholar 

  11. S. Lanio, H. Rose, and D. Krahl, Optik 73, 56 (1986).

    Google Scholar 

  12. G.F. Rempfer, D.M. Desloge, W.P. Skoczylas, and O.H. Griffith, Microscopy and Microanalysis 1 (1997), in press.

    Google Scholar 

  13. W.P. Skoczylas, G.F. Rempfer, and O.H. Griffith, Ultramicroscopy 36, 252 (1991).

    Article  Google Scholar 

  14. L.H. Veneklasen, Rev. Sci. Instrum. 63, 5513 (1992).

    Article  ADS  Google Scholar 

  15. E. Bauer, Rep. Prog. Phys. 57, 895 (1994).

    Article  ADS  Google Scholar 

  16. H. Rose and D. Preikszas, NucI. Instrum. Methods A363, 301 (1995).

    Article  ADS  Google Scholar 

  17. R. Degenhardt and W. Engel, to be published.

    Google Scholar 

  18. H. Rose, Optik 51, 15 (1978).

    Google Scholar 

  19. S. Lanio, Ph. D. Dissertation D 17, TH Darmstadt (1986).

    Google Scholar 

  20. H. Rose and D. Krahl, in Energy-filtering Transmission Electron Microscopy edited by L. Reimer (Springer; Berlin, 1995), p. 43.

    Chapter  Google Scholar 

  21. B.P. Tonner and G.R. Harp, J. Vac. Sci. TechnoI. A7, 1 (1989).

    Article  ADS  Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Editor information

Editors and Affiliations

Rights and permissions

Reprints and permissions

Copyright information

© 1998 Springer-Verlag Berlin Heidelberg

About this chapter

Cite this chapter

Engel, W. et al. (1998). Concept and Design of the SMART Spectromicroscope at BESSY II. In: Thieme, J., Schmahl, G., Rudolph, D., Umbach, E. (eds) X-Ray Microscopy and Spectromicroscopy. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-72106-9_28

Download citation

  • DOI: https://doi.org/10.1007/978-3-642-72106-9_28

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-72108-3

  • Online ISBN: 978-3-642-72106-9

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics