Abstract
The scanning soft X-ray microscope at Hasylab uses photoelectrons, luminescence, photo desorbed ions, reflected, scattered and transmitted photons as signals for imaging and spectroscopy. Mirror optics for grazing and normal incidence provides lateral resolution in the micron and submicron range for photon energies of 15 to 1500 eV. In this article we describe the design and operation of the microscope beamline, and present results obtained with solid state samples.
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Voss, J. et al. (1998). Spectromicroscopy with Soft X-Rays at Hasylab. In: Thieme, J., Schmahl, G., Rudolph, D., Umbach, E. (eds) X-Ray Microscopy and Spectromicroscopy. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-72106-9_26
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DOI: https://doi.org/10.1007/978-3-642-72106-9_26
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