Abstract
Arrays of micro compartments for combinatorial chemistry and biotechnological applications have been fabricated by means of photolithography and anisotropic chemical wet etching. Integration levels of 16′000 per 4″ wafer have been achieved. Optically transparent membranes or micro sieves allowing for rinsing between process steps can be incorporated. For the investigation of thermally activated biochemical reactions a micro compartment array with integrated thermo control has been developed, which allows the adjustment of thermal gradients over a 4″ wafer. Peak temperatures exceeding 90 °C at the center of the wafer as well as temperature gradients with ΔT = 40 °C could be demonstrated. To avoid fluidic crosstalking between adjacent compartments a technique has been developed, that allows selectively hydrophobizing the rims of the compartments.
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References
M. Eigen and W.C. Gardener jr.: “Evolutionary molecular engineering based on RNA replication ”, Pure and Appl. Chem. 56(8), 967–978 (1984)
M. Eigen, “The physics of macromolecular evolution ”, Chemica Scripta 26B, 13–26 (1986)
J.P.A. Fodor, J.L. Read, M.C. Pirrung, L. Stryer, A.T. Lu and D. Solas, “Light-Directed, Spatially Addressable Parallel Chemical Synthesis” Science 251,767 (1991)
J.M. Köhler, A. Schober and A. Schwienhorst, “Micromechanical elements for microchemical systems”, Exp. Tech. Phys. 40(1), 35–56 (1994)
A. Schober, G. Schlingloff, A. Thamm, D. Vetter, D. Tomandl, M. Gebinoga, H.J. Kiel, Ch. Scheffler, M. Döring, J.M. Köhler and G. Mayer: “Systemintegration of Microsystems/Chip Elements in miniaturized Automata for High- Throughput Synthesis and Screening in Biology, Biochemistry and Chemistry”; Proc. of Micro System Technologies 96 (MST), Potsdam, Germany, 17.– 19.9.96, ed.: H. Reichl and A. Heuberger, VDE-Verlag, p. 705–710 (1996)
P. Schuster: “Evolutionary Biotechnology - Theory, Facts and Perspectives” Acta Biotechnol.16, 3–17 (1996)
M.V. Olson, “The human genome project”, Proc. Natl. Acad. Sci. USA 90, 4338–4344 (1993)
H.-W. Fink, H. Schmid, E. Ermantraut and T. Schulz, “Electron Holography of Individual DNA Molecules” accepted for publication in J. Am. Opt. Soc. A
A. Schober, R. Günther, A. Schwienhorst, M. Döring and B.F. Lindemann, “Accurate high speed liquid handling of very small biological samples”, Bio- techniques 15(2), 324 (1993)
G. Mayer and J.M. Köhler: ”Micromechanical Compartments for Biotechno- logical Applications: Fabrication and Investigation of Liquid Evaporation to be published in Sensors and Actuators A
A. Kumar, H.A. Biebuyck and G.M. Whitesides: “Patterning Self Assembled Monolayers: Applications in Material Sciences”, Langmuir 10, 1498–1511 (1994)
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Mayer, G., Tuchscheerer, J., Kaiser, T., Wohlfart, K., Ermantraut, E., Köhler, J.M. (1998). Nano Titer Plates: Micro Compartment Arrays for Biotechnological Applications. In: Ehrfeld, W. (eds) Microreaction Technology. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-72076-5_12
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DOI: https://doi.org/10.1007/978-3-642-72076-5_12
Publisher Name: Springer, Berlin, Heidelberg
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