Abstract
The formation and kinetics of large vapourized-material cluster beams (large size metal clusters) are discussed. The clusters are formed by injecting the vapour of solid state materials into a high vacuum region through a nozzle of a heated crucible. The conditions under which metal clusters form are analysed using nucleation theory. Computer simulation by combining the nucleation and flow equations has also been made. The results show that the theory can be useful in predicting qualitative dependences of metal cluster formation on operation conditions. Several experimental results are also presented, which support the finding that a large size metal cluster is formed by homogeneous nucleation and growth. The advantageous characteristics of ionized cluster beam for thin film formation are also discussed.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
Takagi, T., Yamada, I., Kunori, M., Kobiyama, S.: Proceedings of the 2nd International Conference on Ion Sources, pp. 790–795. Vienna: Österreichische Studiengesellschaft für Atomenergie GmbH 1972
Takagi, T.: Z. Phys. D - Atoms, Molecules and Clusters 3, 271 (1986)
Becker, E. W., Bier, K., Henkes, W.: Z. Phys. 146, 333 (1956)
Stein, G. D.: In: Proceedings of the International Ion Engineering Conference - ISIAT ‘83 & IPAT ’83 - Kyoto. Takagi, T. (ed.), pp. 1165–1176B. Tokyo: Inst. Elect. Eng. Japan 1983
Yamada, I.: ibid. pp. 1177–1192 A
Yang, S.-N., Lu, T.-M.: J. Appl. Phys. 58, 541 (1985)
Yamada, I., Takagi, T.: In: Proceedings of the Xth International Symposium on Molecular Beams, pp. VII-B1-B5. Cannes: DRET & CEA, France 1985
Theeten, J. B., Madar, R., Mircea-Roussel, A., Rocher, A., Laurence, G.: J. Cryst. Growth 37, 317 (1977)
Yamada, I., Takagi, T.: Thin Solid Films 80, 105 (1981)
Yamada, I., Takaoka, H., Inokawa, H., Usui, H., Cheng. S. C., Takagi, T.: Thin Solid Films 92, 137 (1982)
Frankel, J.: Kinetic theory of liquids. New York: Dover Publication 1955
Merritt, G. E., Weatherston, R. C.: AIAA J. 5, 721 (1967)
Thomson, W.: Proc. R. Soc. Edinburgh 7, 63 (1870)
Yamada, I., Takagi, T., Younger, P. R., Blake, J.: SPIE Advanced Applications of Ion Implantation. Vol. 530, pp. 75–83. Los Angeles: Intern. Soc. Opt. Eng. 1985
Yamada, I., Stein, G. D., Usui, H., Takagi, T.: In: Proceedings of the 6th Symposium on Ion Sources and Ion-Assisted Technology. - ISIAT ’82, Tokyo. Takagi, T. (ed.), pp. 47–52. Kyoto: Research Group of Ion Engineering 1982
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1986 Springer-Verlag Berlin Heidelberg
About this paper
Cite this paper
Yamada, I., Usui, H., Takagi, T. (1986). The Formation and Kinetics of Ionized Cluster Beams. In: Träger, F., zu Putlitz, G. (eds) Metal Clusters. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-71571-6_6
Download citation
DOI: https://doi.org/10.1007/978-3-642-71571-6_6
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-71573-0
Online ISBN: 978-3-642-71571-6
eBook Packages: Springer Book Archive