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Submicron Lithography Tools

  • Conference paper
The Physics and Fabrication of Microstructures and Microdevices

Part of the book series: Springer Proceedings in Physics ((SPPHY,volume 13))

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Abstract

During the last 50 years, the feature size of components has been reduced from a few centimeters for valves to a few microns for transistors in integrated circuits. Four orders of magnitude have therefore been gained in the race for miniaturization.

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Author information

Authors and Affiliations

  1. 79, rue Vatonne, F-91191, Gif sur Yvette, France

    G. Pircher

  2. Laboratoire Central de Recherches, Thomson-CSF, Domaine de Corbeville, B.P. 10, F-91401, Orsay Cedex, France

    J. Perrocheau

Authors
  1. G. Pircher
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  2. J. Perrocheau
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Editor information

Editors and Affiliations

  1. GEC Research Ltd., East Lane, HA9 7PP, Wembley, Middlesex, England

    Michael J. Kelly

  2. Laboratoire Central de Recherches, Thomson-CSF, F-91401, Orsay, France

    Claude Weisbuch

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© 1986 Springer-Verlag Berlin Heidelberg

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Pircher, G., Perrocheau, J. (1986). Submicron Lithography Tools. In: Kelly, M.J., Weisbuch, C. (eds) The Physics and Fabrication of Microstructures and Microdevices. Springer Proceedings in Physics, vol 13. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-71446-7_2

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  • DOI: https://doi.org/10.1007/978-3-642-71446-7_2

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-71448-1

  • Online ISBN: 978-3-642-71446-7

  • eBook Packages: Springer Book Archive

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