Abstract
The drive for higher speed and higher density electronic circuits has been pushing fabrication technology to increasingly smaller, dimensions. It is clear that past advances of electronic circuit development cannot be extrapolated much further into the future, because in straightforward scaling-down existing device concepts will fail. As the dimensions of structures approach and shrink below characteristic length scales in solids, new physical phenomena come into play. This may be viewed as an impediment to extending current device technology. It may also be viewed as strong motivation to the physicist and engineer to consider the basic assumptions of device technology and stimulate consideration of physical phenomena of small structures.
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© 1986 Springer-Verlag Berlin Heidelberg
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Craighead, H.G. (1986). Fabrication of Small Structures of Semiconductors and Metals. In: Kelly, M.J., Weisbuch, C. (eds) The Physics and Fabrication of Microstructures and Microdevices. Springer Proceedings in Physics, vol 13. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-71446-7_12
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DOI: https://doi.org/10.1007/978-3-642-71446-7_12
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