Abstract
We give an overview on the characterization of superlattices by X-rays diffraction. We show that this technique provides excellent determination of structural parameters as well as departure from ideality. We will limit ourselves to practical considerations for the user.
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Quillec, M. (1986). Structural Characterization of Superlattices by X-Ray Diffraction. In: Kelly, M.J., Weisbuch, C. (eds) The Physics and Fabrication of Microstructures and Microdevices. Springer Proceedings in Physics, vol 13. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-71446-7_10
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DOI: https://doi.org/10.1007/978-3-642-71446-7_10
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