Abstract
One of the most important features of VLSI technique, especially in view of VLSI devices, is the change from the conventional integration of circuits (Integrated Circuit: IC) to the integration of systems itself (Integrated System: IS) as the result of an increased level of integration.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1986 Springer-Verlag Berlin Heidelberg
About this chapter
Cite this chapter
Tarui, Y. (1986). Basic Device Technology. In: Tarui, Y. (eds) VLSI Technology. Springer Series in Electrophysics, vol 12. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-69192-8_8
Download citation
DOI: https://doi.org/10.1007/978-3-642-69192-8_8
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-69194-2
Online ISBN: 978-3-642-69192-8
eBook Packages: Springer Book Archive