Non-Destructive Techniques for Measuring the Parameters of Low-Energy Continuous Ion Beams

  • W. J. Szajnowski
Conference paper
Part of the Springer Series in Electrophysics book series (SSEP, volume 11)


The commercial significance of ion implantation as a production tool has caused an increasing interest in fully automated systems. The design of such systems requires that special attention be given to methods ensuring the reproducibility of ion-beam parameters. In order to measure the beam parameters in real time during implantation, special devices have been developed. The information about the beam parameters is extracted from the electromagnetic field associated with the moving charged particles. Another source of information is visible light emitted following collisions of the beam particles with the residual gas molecules.


Weighting Function Scatter Diagram Beam Parameter Line Charge Visible Light Emit 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Springer-Verlag Berlin Heidelberg 1983

Authors and Affiliations

  • W. J. Szajnowski
    • 1
  1. 1.Institute of TelecommunicationsTechnical University of WarsawWarsawPoland

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