Comparison of Beam Scanning Systems

  • N. Turner
Conference paper
Part of the Springer Series in Electrophysics book series (SSEP, volume 11)

Abstract

Present day ion implanters provide uniform distribution of energetic ions into target materials, utilizing one or two of the basic beam scanning techniques; electrostatic, magnetic, and mechanical. Each beam scanning technique has physical limits and characteristics which affect its successful use in an ion implanter for semiconductor processing. This paper reviews the features and limits of each beam scanning technique. X-Y beam scanning systems using magnetic and electrostatic deflection are described. The ability for electrostatic X-Y scanning of μ perv.*, is reviewed and results reported.

Keywords

Cage Ferrite Assure Lamination 

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Copyright information

© Springer-Verlag Berlin Heidelberg 1983

Authors and Affiliations

  • N. Turner
    • 1
  1. 1.Varian/Extrion DivisionGloucesterUSA

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