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Principles of Chemical Etching — The Art and Science of Etching Crystals

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Silicon Chemical Etching

Part of the book series: Crystals ((CRYSTALS,volume 8))

Abstract

The rate of reaction of a solution with a solid surface can depend distinctly on the crystallographic orientation of the reacting surfaces. This rate dependence is the basis of “etching”, which is then understood as the intentional utilization of specific chemical attack in order to reveal crystal symmetries and lattice defects.

This subtitle is borrowed from the book “The Art and Science of Growing Crystals” by J. J. Gilmanl). It is meant as a reference to a fine piece of work which considerably boosted materials science

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References

  1. Gilman, J. J.: “The Art and Science of Growing Crystals”. New York, J. Wiley 1963

    Google Scholar 

  2. Schreibers, C. V.: Beitr. z. Geschichte u. Kenntnis d. meteorischen Steine u. Eisenmassen. Wien, 1820

    Google Scholar 

  3. Baumhauer, H.: Die Resultate d. Atzmethode in d. krystallographischen Forschung, an einer Reihe von krystallisierten Körpern dargestellt. Leipzig, W. Engelmann 1894

    Google Scholar 

  4. Honess, A. P.: The Nature, Origin and Interpretation of Etch Figures on Crystals, New York, J. Wiley 1927

    Google Scholar 

  5. Frank, F. C.: Disc. Faraday Soc. 5, 48 (1949)

    Google Scholar 

  6. Amelinckx, S.: Acta Met. 2, 848 (1954)

    Google Scholar 

  7. Gilman, J. J., Johnston, W. G.: Dislocation and Mechanical Properties of Crystals, New York, J. Wiley 1957, p. 116

    Google Scholar 

  8. Vogel, F. L. et al.: Phys. Rev. 90,489 (1953)

    CAS  Google Scholar 

  9. Shaw, D. W.: J. Crystal Growth 47, 509 (1979)

    CAS  Google Scholar 

  10. Amelinckx, S.: The Direct Observation of Dislocations. Solid State Physics 6, New York — London, Academic Press 1964

    Google Scholar 

  11. Johnston, W. G.: Dislocation etch pits in non-metallic crystals. Progress in Ceramic Science, J. E. Burke (ed.), New York, Pergamon Press Inc. 1962, p. 1

    Google Scholar 

  12. Faust, J. W.: Etching of metals and semiconductors in: The Surface Chemistry of Metals and Semiconductors, H. C. Gatos (ed.), New York, J. Wiley 1960, p. 151

    Google Scholar 

  13. Ives, M. B.: Localized Corrosion, NACE-3, Houston: Nat. Assoc. Corros. Eng. 1974, p. 78

    Google Scholar 

  14. Heimann, R. B.: Auflösung von Kristallen. Theorie u. technische Anwendung. Appl. Min., 8. Wien — New York, Springer 1975

    Google Scholar 

  15. Hughes, H. G., Rand, M. F. (Ed.): “Etching”. Princeton, The Electrochem. Soc. Inc. 1976

    Google Scholar 

  16. Petzow, G.: Metallographisches Atzen. Berlin — Stuttgart, Gebr. Borntraeger 1976

    Google Scholar 

  17. Kern, W., Deckert, C. A.: Chemical Etching, in: Thin Film Processes (J. L. Vossen, W. Kern (eds.)), New York, Academic Press 1978, Chap. 5

    Google Scholar 

  18. Bond, W. L.: Crystal Technology. New York, London, Sydney, Toronto, John Wiley & Sons 1976, p. 129

    Google Scholar 

  19. Ives, M. B., Hirth, J. P.: J. Chem. Phys. 33, 517 (1960)

    CAS  Google Scholar 

  20. Gross, R.: Abhandl. Königl. Sächs. Ges. Wiss. Leipzig, math.-phys. Kl. 35, 137 (1918)

    Google Scholar 

  21. Batterman, B.: J. Appl. Phys. 28,1236 (1957)

    CAS  Google Scholar 

  22. Irving, B. A.: J. Appl. Phys. 31, 109 (1960)

    CAS  Google Scholar 

  23. Riessler, W.: Z. Angew. Phys. 12, 433 (1960)

    CAS  Google Scholar 

  24. Hartman, P., Perdok, W.: Acta Cryst. 8, 49 (1955)

    CAS  Google Scholar 

  25. Stranski, I. N.: Z. Phys. Chem. 136, 259 (1928)

    CAS  Google Scholar 

  26. Gibbs, J. W.: “Collected Works”, New York, Longmans, Green & Co. 1928

    Google Scholar 

  27. Wulff, G.: Z. Krist. 34, 449 (1901)

    CAS  Google Scholar 

  28. Knacke, O., Stranski, I. N.: Z. Elektrochem. 60, 816 (1956)

    CAS  Google Scholar 

  29. Herring, C.: Phys. Rev. 82,87 (1951)

    CAS  Google Scholar 

  30. Gjostein, N. A.: Acta Met. 11, 957 (1963)

    CAS  Google Scholar 

  31. Frank, F. C.: in Growth and Perfection of Crystals (ed. by R. H. Doremus, B. W. Roberts, D. Turnbull (eds.)) New York, John Wiley 1958, p. 411

    Google Scholar 

  32. Cabrera, N.: Proc. Int. Symp. Reactivity Solids 4, Amsterdam 1960, p. 345

    Google Scholar 

  33. Chernov, A. A.: Soviet Phys. Uspekhi 4, 116 (1961)

    Google Scholar 

  34. Lighthill, M. J., Whitham, G. B.: Proc. Roy. Soc. A229, 281 (1955)

    Google Scholar 

  35. van der Putte, P. et al.: J. Crystal Growth 43, 659 (1978)

    Google Scholar 

  36. Yamamoto, M., Watanabe, J., Suenaga, H.: Sci. Rep. RITU A17, 243 (1965)

    Google Scholar 

  37. Mullins, W. W., Hirth, J. P.: J. Phys. Chem. Solids 24, 1391 (1963)

    CAS  Google Scholar 

  38. Chernov, A. A.: Dokl. Akad. Nauk SSSR 117, 983 (1957)

    CAS  Google Scholar 

  39. Hirth, J. P., Pound, G. M.: Condensation a. Evaporation. Oxford, London, Paris, Pergamon Press 1963

    Google Scholar 

  40. Ives, M. B., McElroy, R. O.: Nonr. 3925 (00), Tech. Rept. No. 10 (1967)

    Google Scholar 

  41. Hulett, L. D., Young, F. W.: J. Phys. Chem. Solids 26, 1287 (1965)

    CAS  Google Scholar 

  42. Burton, W. K., Cabrera, N., Frank, F. C.: Phil. Trans. Roy. Soc. A 243, 299 (1951)

    Google Scholar 

  43. Hirth, J. P., Pound, G. M.: J. Chem. Phys. 26, 1216 (1957)

    CAS  Google Scholar 

  44. Sears, G. W.: J. Chem. Phys. 32, 1317 (1960)

    CAS  Google Scholar 

  45. Cabrera, N., Levine, M. M.: Phil. Mag. 1, 450 (1956)

    CAS  Google Scholar 

  46. Bienfait, M., Boistelle, R., Kern, R.: Conf. Rep. Adsorption et croissance cristalline, C.N.R.S., Nancy 1965, p. 577

    Google Scholar 

  47. Hari Babu, V., Sirdeshmuk, D. B., Bansigir, K. G.: Phil. Mag. 14, 1067 (1966)

    Google Scholar 

  48. Subramanian, B., Bansigir, K. G.: J. Phys. D: Appl. Phys. 13, 419 (1980)

    Google Scholar 

  49. Vermilyea, D.: J. Electrochem. Soc. 116, 1179 (1969)

    Google Scholar 

  50. Kawabuchi, K.: J. Cryst. Growth 11, 92 (1971)

    CAS  Google Scholar 

  51. Kawabuchi, K., Suzuki, T.: J. Cryst. Growth 8, 288 (1971)

    CAS  Google Scholar 

  52. Suzuki, T.: J. Cryst. Growth 20, 152 (1973)

    CAS  Google Scholar 

  53. Butter, E. et al.: Krist. und Technik 8,1021 (1973)

    CAS  Google Scholar 

  54. Tietze, H.-J., Butter, E.: Krist. und Technik 8, 1303 (1973)

    CAS  Google Scholar 

  55. Schulz, M. et al.: Krist. und Technik 8,1421 (1973)

    CAS  Google Scholar 

  56. Gatos, H. C., Lavine, M. C.: J. Electrochem. Soc. 107, 433 (1960)

    CAS  Google Scholar 

  57. Lavine, M. C., Gatos, H. C., Finn, M. C.: J. Electrochem. Soc. 108, 974 (1961)

    CAS  Google Scholar 

  58. Wyon, G., Marchin, J. M., Lacombe, P.: Mém. Sci. Rev. Mét. 56, 549 (1959)

    CAS  Google Scholar 

  59. Barber, D. J.: J. Appl. Phys. 33, 3141 (1962)

    CAS  Google Scholar 

  60. Thomas, J. M., Renshaw, G. D., Roscoe, C.: Nature 203, 72 (1964)

    CAS  Google Scholar 

  61. Frank, F. C., Puttick, K. E.: Phil. Mag. 3, 1273 (1958)

    Google Scholar 

  62. Evans, T., Sauter, D. M.: Phil. Mag. 6, 429 (1961)

    CAS  Google Scholar 

  63. vanEnckevort, W. J. P., Giling, L. J.: J. Crystal Growth 45, 90 (1978)

    CAS  Google Scholar 

  64. Gottschalch, V., Petzke, W.-H., Butter, E.: Kristall und Technik 7, 1007 (1972)

    CAS  Google Scholar 

  65. Akgöz, Y. C., Farley, J. M., Saunders, G. A.: J. Mat. Science 7, 598 (1972)

    Google Scholar 

  66. Orowan, E.: Z. Phys. 89, 634 (1934)

    Google Scholar 

  67. Taylor, G. I.: Proc. Royal Soc. A 145, 362 (1934)

    CAS  Google Scholar 

  68. Frank, F. C.: Proc. phys. Soc. London 62, 131 (1949)

    Google Scholar 

  69. Nabarro, F. R. N.: “Theory of Crystal Dislocations”. Oxford, Clarendon Press 1967

    Google Scholar 

  70. Amelinckx, S., Bontinck, W., DeKeyser, W.: Phil. Mag. 2, 1264 (1957)

    CAS  Google Scholar 

  71. Roscoe, C., Thomas, J. M.: Carbon 4, 383 (1966)

    CAS  Google Scholar 

  72. Lang, A. R.: J. Appl. Phys. 28,497 (1957)

    CAS  Google Scholar 

  73. Bauser, E., Strunk, H.: J. Crystal Growth 51, 62 (1981)

    Google Scholar 

  74. Frank, F. C.: J. Crystal Growth 51, 367 (1981)

    CAS  Google Scholar 

  75. Cabrera, N., Levine, M. M., Plaskett, J. S.: Phys. Rev. 96, 1153 (1954)

    CAS  Google Scholar 

  76. Schaarwächter, W.: Phys. Stat. Solidi 12, 375 (1965)

    Google Scholar 

  77. Amelinckx, S.: Phil. Mag. 1, 264 (1956)

    Google Scholar 

  78. Kuramoto, E.: Scr. Met. 6, 1227 (1972)

    CAS  Google Scholar 

  79. Otake, S., Koike, S., Motohashi, Y.: Japan J. Appl. Phys. 12,636 (1973)

    CAS  Google Scholar 

  80. Streb, G., Reppich, B.: Phys. Stat. Solidi 16, 493 (1973)

    CAS  Google Scholar 

  81. Winter, A. T.: Phil. Mag. 28, 57 (1973)

    CAS  Google Scholar 

  82. Dash, W. C.: J. Appl. Phys. 27, 1193 (1956)

    CAS  Google Scholar 

  83. Paufler, P., Schulze, G. E. R.: Kristall und Technik 3, 113 (1968)

    CAS  Google Scholar 

  84. Roy, U., Glassco, D.: J. Crystal Growth 16, 227 (1972)

    CAS  Google Scholar 

  85. Shaskolskaya, M. P., Wang Yang-Wen : Soviet Phys. Cryst. 6, 216 (1961)

    Google Scholar 

  86. Hedges, J. M., Mitchell, J. W.: Phil. Mag. 44, 223 (1953)

    CAS  Google Scholar 

  87. Bethge, H., Keller, W.: Z. Naturforsch. 15,271 (1960)

    Google Scholar 

  88. Keller, W.: Kristall und Technik 5, 1–4 (1970)

    Google Scholar 

  89. Amelinckx, S., Bontinck, W. : Physica 23, 270 (1957)

    CAS  Google Scholar 

  90. Klija, M. O., Tschernischeva, M. A.: Kristallografija 11, 656 (1966)

    Google Scholar 

  91. Amelinckx, S., Strumane, R.: Silicon Carbide. New York, Pergamon Press 1960

    Google Scholar 

  92. Dash, W. C. in: Dislocation and Mechanical Properties of Crystals (J. C. Fisher et al. (ed.), New York, John Wiley 1957, p. 57

    Google Scholar 

  93. Shiraki, H. in: “Semiconductor Silicon 1977” (Huff, H. R., Sirtl, E. (ed.)), The Electrochem. Soc. Softbound Proc. Series. Princeton, N. J., p. 546

    Google Scholar 

  94. Frank, F. C.: Physica 15, 131 (1949)

    Google Scholar 

  95. Wernick, J. H. et al.: J. Appl. Phys. 29,1013 (1958)

    CAS  Google Scholar 

  96. Newkirk, J. B.: J. Appl. Phys. 29, 995 (1958)

    CAS  Google Scholar 

  97. Bonse, U., Kappler, E.: Z. Naturf. 13a,348 (1958)

    CAS  Google Scholar 

  98. McDermott, I. T., Phakey, P. P.: J. Appl. Cryst. 4, 479 (1971)

    CAS  Google Scholar 

  99. Shah, B. S., Sherwood, J. N.: Trans. Faraday Soc. 67, 1200 (1971)

    CAS  Google Scholar 

  100. Nishikawa, Y., Tsuruta, T., Yamuzaki, R.: J. Nuclear Sci. Techn., Tokyo 8, 162 (1971)

    Google Scholar 

  101. Keller, C.: Bild der Wissenschaft 12 (1978)

    Google Scholar 

  102. Wagner, G. A.: Fortschr. Mineral. 51, 68 (1973)

    CAS  Google Scholar 

  103. Suzuki, H.: J. Phys. Soc. Japan 10, 981 (1955)

    CAS  Google Scholar 

  104. Vassamillet, L., Hirth, J. P.: J. Appl. Phys. 29, 595 (1958)

    Google Scholar 

  105. Springer, E.: Z. Metallk. 62,298 (1971)

    CAS  Google Scholar 

  106. Spreadborough, J. et al.: J. Appl. Phys. 35, 3585 (1964)

    CAS  Google Scholar 

  107. Tarnmann, G., Krings, W.: Z. Anorg. Allg. Chem. 146, 420 (1925)

    Google Scholar 

  108. Kleber, W.: Z. Elektrochemie 62, 587 (1958)

    CAS  Google Scholar 

  109. Herzfeld, K. H., Hettich, A.: Z. Phys. 38, 1 (1926)

    CAS  Google Scholar 

  110. Royer, L.: Compt. Rend. Acad. Sci. Paris 202, 1346 (1936)

    CAS  Google Scholar 

  111. Kleber, W.: Angewandte Gitterphysik, 3. Aufl., Berlin, Walter de Gruyter 1960

    Google Scholar 

  112. Patel, J. R., Jackson, K. A., Reiss, H.: J. Appl. Phys. 48, 5279 (1977)

    CAS  Google Scholar 

  113. Shimura, F., Tsuya, H., Kawamura, T.: J. Appl. Phys. 51, 269 (1980)

    CAS  Google Scholar 

  114. Tsuya, H., Tanno, K., Shimura, F.: Appl. Phys. Letters 36, 658 (1980)

    CAS  Google Scholar 

  115. Sirtl, E., Adler, A.: Z. Metallkunde 52, 529 (1961)

    CAS  Google Scholar 

  116. Heimann, R. B., Ives, M. B., Zaya, P.: J. Crystal Growth, 57, 48 (1982)

    CAS  Google Scholar 

  117. Heimann, R. B., Ives, M. B.: to be published

    Google Scholar 

  118. Rozgonyi, G. A. et al.: J. Appl. Phys. 43, 3141 (1972)

    CAS  Google Scholar 

  119. Abrahams, M. S., Buiocchi, C. J.: J. Appl. Phys. 36, 2855 (1965)

    CAS  Google Scholar 

  120. Richards, J. L., Crocker, A. J.: J. Appl. Phys. 31,611 (1960)

    CAS  Google Scholar 

  121. Ives, M. B., McAusland, D. D.: Surface Science 12, 189 (1968)

    CAS  Google Scholar 

  122. Gitkins, R. C., Corbett, J. A.: Lab. Methods 74, 239 (1966)

    Google Scholar 

  123. Spink, G. M., Ives, M. B.: J. Appl. Phys. 42,511 (1971)

    CAS  Google Scholar 

  124. Hisamatsu, Y., Ichikawa, K.: Boshoku Gijutsu 23, 117 (1974)

    CAS  Google Scholar 

  125. Schadler, H. W. in: Direct Observation of Imperfections in Crystals. New York, J. Wiley 1962, p. 593

    Google Scholar 

  126. Taoka, T., Furubayashi, E., Takeuchi, S.: Japanese J. Appl. Phys. 4, 120 (1965)

    Google Scholar 

  127. Kon, K., Tsujikawa, S., Hisamatsu, Y.: Jap. J. of Metals 43, 770 (1979)

    CAS  Google Scholar 

  128. Vetter, K. J., Strehblow, H. H.: Ber. Bunsenges. Phys. Chem. 74, 1024 (1970)

    CAS  Google Scholar 

  129. Seiter, H. in: “Semiconductor Silicon 1977” (Huff, H. R., Sirtl, E. (ed.)), The Electrochem. Soc. Softbound Proceedings Series, Princeton, N. J., p. 187

    Google Scholar 

  130. Secco d’Aragona, F.: J. Electrochem. Soc. 119 (7),948 (1972)

    Google Scholar 

  131. Föll, H.: J. Electrochem. Soc. 127 (9), 1925 (1980)

    Google Scholar 

  132. Schloemer, H., Müller, F.: Ber. Dtsch. Keram. Ges. 45, 11 (1968)

    CAS  Google Scholar 

  133. Mahl, H., Stranski, I. N.: Z. Phys. Chem. B51, 319 (1942)

    CAS  Google Scholar 

  134. Nielsen, J. W., Foster, F. G.: Am. Min. 45, 299 (1960)

    CAS  Google Scholar 

  135. Hanyu, T.: J. Phys. Soc. Japan 19, 1489 (1964)

    Google Scholar 

  136. McBrayer, R. D., Palmour III H., Kumar Mehta, P.: J. Am. Ceram. Soc. 46, 504 (1963)

    CAS  Google Scholar 

  137. Gorski, W.: Naturwiss. 51,318 (1964)

    Google Scholar 

  138. Doliwo-Dobrowolskaja, G. I., Ljubalin, M. D., Mokijewski, W. A.: Izv. Akad. Nauk SSSR, Ser. Fiz. 36 (3), 567 (1972)

    Google Scholar 

  139. Heimann, R.: PhD thesis, Freie Univ., Berlin 1966

    Google Scholar 

  140. Westwood, A. R. C., Oppenhauser, H., Goldheim, D. L.: J. Appl. Phys. 33, 1764 (1962)

    CAS  Google Scholar 

  141. Schimmel, D. G.: J. Electrochem. Soc. 126 (3), 479 (1979)

    CAS  Google Scholar 

  142. Frank, F. C.: Z. Phys. Chem., N. F., 77, 84 (1972)

    CAS  Google Scholar 

  143. Frank, F. C., Ives, M. B.: J. Appl. Phys. 31,1996 (1960)

    CAS  Google Scholar 

  144. Lacmann, R.: N. Jb. Mineral, Abh. 122, 36 (1974)

    CAS  Google Scholar 

  145. Wolff, G. A., Gualtieri, J. G.: Am. Min. 47, 562 (1962)

    CAS  Google Scholar 

  146. Lacmann, R., Franke, W., Heimann, R.: J. Crystal Growth 26, 107 (1974)

    CAS  Google Scholar 

  147. Heimann, R.: Z. Phys. Chem., N.F., 104, 11 (1977)

    CAS  Google Scholar 

  148. Shaw, D. W.: J. Electrochem. Soc., 128, 874 (1981)

    CAS  Google Scholar 

  149. Schwartz, B., Robbins, H.: J. Electrochem. Soc. 123 (12), 1903 (1976)

    CAS  Google Scholar 

  150. Faust, A., Schreiter, P.: Kristall und Technik 8, 95 (1973)

    CAS  Google Scholar 

  151. Curran, J. E.: J. Phys. E: Sci. Instrum. 14, 393 (1981)

    CAS  Google Scholar 

  152. Lin, B. J.: J. Electrochem. Soc. 127, 202 (1980)

    CAS  Google Scholar 

  153. Roberts, E. D.: Vacuum 26, 459 (1976)

    CAS  Google Scholar 

  154. Bowden, M. J., Thompson, L. F.: Solid State Technol. 5, 72 (1979)

    Google Scholar 

  155. Smith, H. I.: Proc. IEEE 62, 1361 (1974)

    Google Scholar 

  156. Sullivan, P. A., McCoy, J. H.: J. Vac. Sci. Technol. 12, 1325 (1975)

    Google Scholar 

  157. Rensch, D. B. et al.: J. Vac. Sci. Technol. 16, 1897 (1979)

    CAS  Google Scholar 

  158. Glang, R., Gregor, L. V.: in “Handbook of Thin Film Technology”, Chap. 7 (L. I. Maissel, R. Glang (ed.)), New York, McGraw-Hill 1970

    Google Scholar 

  159. Parisi, G., Haszko, S., Rozgonyi, G.: J. Electrochem. Soc. 124, 917 (1977)

    CAS  Google Scholar 

  160. Kawabe, M. et al.: J. Vac. Sci. Technol. 15, 1096 (1978)

    CAS  Google Scholar 

  161. Kirk, R. W.: “Application of Plasma Techn. to the Fabrication of Semiconductor Devices”, in: Techniques and Application of Plasma Chemistry (J. R. Hollahan and A. T. Bell (ed.)), New York, J. Wiley 1975, Chapt. 9, p. 347

    Google Scholar 

  162. Melliar-Smith, C. M., Mogab, C. J.: “Plasma Assisted Etching Techniques for Pattern Delineation”, in: Thin Film Processes (J. R. Vossen, W. Kern (ed)), New York, Academic Press 1978

    Google Scholar 

  163. Landauer, R.: J. Appl. Phys. 51, 5594 (1980)

    Google Scholar 

  164. Coffins, M. A., Blumen, A., Currie, J. F., Ross, J.: Phys. Rev. B19, 3630 (1979)

    Google Scholar 

  165. Rebbi, C.: Scientific American, 240 (2), 92 (1979)

    CAS  Google Scholar 

  166. Seeger, A., Schiller, P. in: “Physical Acoustics”, (W. P. Mason (ed)), New York: Academic Press, Vol. III, 1966, p. 361

    Google Scholar 

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  1. Robert B. Heimann

    Present address: 3M Canada Inc., Institute for Aerospace Studies, University of Toronto, Downsview, Ont., M3H 5T6, Canada

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  1. Institute for Materials Research, McMaster University, Hamilton, Ont., L8S 4M1, Canada

    Robert B. Heimann

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Heimann, R.B. (1982). Principles of Chemical Etching — The Art and Science of Etching Crystals. In: Grabmaier, J. (eds) Silicon Chemical Etching. Crystals, vol 8. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-68765-5_3

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