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Herstellung aktiver Bauelementschichten

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Technologie der III/V-Halbleiter

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Zusammenfassung

Die Herstellung aktiver Schichten ist eine kontrollierte technische Beeinflussung des Halbleiterkristalls in Bezug auf:

  • Dicke,

  • Dotierung mit Fremdatomen

  • und seine stöchiometrische Zusammensetzung (Heterostrukturen).

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Authors and Affiliations

  1. Fachbereich Elektrotechnik, Gerhard-Mercator-Universität, Kommandantenstr. 60, 47057, Duisberg, Deutschland

    Werner Prost

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  1. Werner Prost
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© 1997 Springer-Verlag Berlin Heidelberg

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Prost, W. (1997). Herstellung aktiver Bauelementschichten. In: Technologie der III/V-Halbleiter. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-60786-8_4

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  • DOI: https://doi.org/10.1007/978-3-642-60786-8_4

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-540-62804-0

  • Online ISBN: 978-3-642-60786-8

  • eBook Packages: Springer Book Archive

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