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Part of the book series: Springer Series in Cluster Physics ((CLUSTER))

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Abstract

The availability of efficient atomization methods is the prerequisite for the realization of an intense cluster source. Another requirement is the control of the parameters of gas aggregation determining the growth rate, and hence the mass distribution of the particles. Once formed, the clusters must be extracted from the source with their original physico-chemical characteristics unperturbed.

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References

  1. K.J. Ross, B. Sonntag: Rev. Sci. Instrum. 66, 4409 (1995)

    Article  ADS  Google Scholar 

  2. C.J. Smithells: Metals Reference Book, (Butterworth, London, 1962)

    Google Scholar 

  3. Handbook of Chemistry and Physics, 57th ed, (Chemical Rubber, Boca Raton, 1983)

    Google Scholar 

  4. R.J. Lewis (ed.): Registry of Toxic Effects of Chemical Substances, (U.S. Department of Health, Education and Welfare, Washington D.C., 1979)

    Google Scholar 

  5. W.H. Kohl: Materials and Techniques for Electron Tubes, (Chapman and Hall, London, 1960)

    Google Scholar 

  6. Balzers Coatings Materials Sputtering Targets, Evaporation Sources 1990/1992

    Google Scholar 

  7. A. Hausmann, B. Kammerling, H. Kossmann, V. Schmidt: Phys. Rev. Lett. 23, 2669 (1988)

    Article  ADS  Google Scholar 

  8. J.M. Dyke, A. Morris, J.C.H. Stevens: Chem. Phys. 102, 29 (1986)

    Article  Google Scholar 

  9. J.M. Dyke, S. Elbel, A. Morris, J.C.H. Stevens: J. Chem. Soc. Faraday Trans. 82, 637 (1986)

    Article  Google Scholar 

  10. M.O. Krause, A. Svensson, A. Fahlmann, T.A. Carlson, F. Cerrina: Z. Phys. D2, 327 (1986)

    ADS  Google Scholar 

  11. J.M. Dyke, N.K. Fayad, G.D. Josland, A. Morris: Chem. Phys. 67, 245 (1982)

    Article  Google Scholar 

  12. J.M. Dyke, N.K. Fayad, A. Morris, I.R. Trickle: J. Phys B 12, 2985 (1979)

    ADS  Google Scholar 

  13. V.E. Bondybey, G.P. Schwartz, J.E. Griffiths: J. Mol. Spectrosc. 89, 328 (1981)

    Article  ADS  Google Scholar 

  14. L.I. Maissei, R. Gland (eds.): Handbook of Thin Films Technology, (McGraw-Hill, New York, 1970)

    Google Scholar 

  15. RD. Johnson: J. Am. Ceram. Soc. 33, 168 (1950)

    Article  Google Scholar 

  16. R. Kieffer, F. Benesovsky: Metalurgia 58, 119 (1958)

    Google Scholar 

  17. W.H. Crumley, J.S. Hayden, J.L. Gole: J. Chem. Phys. 84, 5250 (1986)

    Article  ADS  Google Scholar 

  18. J.S. Hayden, R. Woodward, J.L. Gole: J. Phys. Chem. 90, 1799 (1986)

    Article  Google Scholar 

  19. D. Bulgin, J. Dyke, J. Goodfellow, N. Jonathan, E. Lee, A.J. Morris: Electron Spectrosc. 12, 67 (1977).

    Article  Google Scholar 

  20. D.B. Chrisey, G.K. Hubler (eds): Pulsed Laser Deposition of Thin Films, (Wiley, New York, 1994)

    Google Scholar 

  21. J.C. Miller (ed): Laser Ablation, Springer Ser. Mater. Sci., vol. 28, (Springer, Berlin, Heidelberg, 1994)

    Google Scholar 

  22. M. von Allmen (ed.): Laser-Beam Interactions with Materials, Springer Ser. Mater. Sei., vol.2, (Springer, Berlin, Heidelberg, 1987)

    Google Scholar 

  23. R.E. Smalley: Laser Chem. 2, 167 (1983)

    Article  Google Scholar 

  24. P. Milani, W.A. deHeer: Rev. Sci. Instrum. 61, 1835 (1990)

    Article  ADS  Google Scholar 

  25. M. Samy El-Shall, W. Slack, W. Vann, D. Kane, D. Hanley: J. Phys. Chem. 98, 3067 (1994)

    Article  Google Scholar 

  26. J.M. Ballestreros, R. Serna, J. Solis, C.N. Afonso, A.K. Petford-Long, D.H. Osborne, R.F. Haglund, Jr.: Appl. Phys. Lett. 71, 2445 (1997)

    Article  ADS  Google Scholar 

  27. J. Cheung, J. Horwitz: MRS Bull. 30 (1992)

    Google Scholar 

  28. A. Peterlongo, A. Miotello, R. Kelly: Phys. Rev. E 50, 4716 (1994)

    ADS  Google Scholar 

  29. W. Kautek, B. Roas, L. Schultz: Thin Solid Films 191, 317 (1990)

    Article  ADS  Google Scholar 

  30. J.T. Cheung, H. Sankur, Crit. Rev. Solid State Mater. Sci. 15, 63 (1988)

    Article  Google Scholar 

  31. C.L. Chan, J. Mazumder: J. Appl. Phys. 62, 4579 (1987)

    Article  ADS  Google Scholar 

  32. E. van de Riet, C.J.C.M. Nillesen, J. Dieleman: J. Appl. Phys. 74, 2008 (1993)

    Article  ADS  Google Scholar 

  33. J.F. Ready: Industrial Applications of Lasers, (Academic Press, New York, 1976)

    Google Scholar 

  34. H.J. Freund, S.H. Bauer: J. Phys. Chem. 81, 994 (1977)

    Article  Google Scholar 

  35. M.A. Lieberman, A.J. Lichtemberg: Principles of Plasma Discharges and Materials Processing, (Wiley, New York, 1994)

    Google Scholar 

  36. Y.P. Raizer: Gas Discharge Physics, (Springer, Berlin, Heidelberg, 1991)

    Google Scholar 

  37. G. Disatnik, R.L. Boxman, S. Goldsmith: IEEE Trans. Plasma Sci. PS-15, 520 (1987)

    Article  ADS  Google Scholar 

  38. S. Anders, A. Anders: IEEE Trans. Plasma Sci. 19, 20 (1991)

    Article  ADS  Google Scholar 

  39. J. Vyskočil, J. Musil: Surf. Coat. Technol. 43/44, 299 (1990)

    Article  Google Scholar 

  40. H. Randhawa, P.C. Johnson: Surf. Coat. Technol. 31, 303 (1987)

    Article  Google Scholar 

  41. R.L. Boxman, S. Goldsmith: Surf. Coat. Technol. 33, 153 (1987)

    Article  Google Scholar 

  42. T. Utsumi: Appl. Phys. Lett. 18, 218 (1971)

    Article  ADS  Google Scholar 

  43. H.C. Miller: IEEE Trans. Plasma Sci. PS-13, 242 (1985)

    Article  ADS  Google Scholar 

  44. S. Shalev, R.L. Boxman, S. Goldsmith: J. Appl. Phys. 58, 2503 (1985)

    Article  ADS  Google Scholar 

  45. B. Geliert, E. Schade, E. Dullni: IEEE Trans. Plasma Sci. PS-15, 545 (1987)

    Article  ADS  Google Scholar 

  46. C.W. Kimblin: J. Appl. Phys. 44, 3014 (1973)

    Google Scholar 

  47. C.W. Kimblin: J. Appl. Phys. 45, 5235 (1974)

    Article  ADS  Google Scholar 

  48. M.G. Drouet, J.-L. Meunier: IEEE Trans. Plasma Sci. PS-13, 285 (1985)

    Article  ADS  Google Scholar 

  49. J.-L. Meunier, M.G. Drouet: IEEE Trans. Plasma Sci. PS-15, 515 (1987)

    Article  ADS  Google Scholar 

  50. J.-L. Meunier: IEEE Trans. Plasma Sci. 18, 904 (1990)

    Article  ADS  Google Scholar 

  51. L.D. Landau, E.M. Lifshits: Statistical Physics, vol. 1, (Pergamon Press, Oxford, 1980)

    Google Scholar 

  52. O. Hagena: Surf. Sci. 106, 101 (1981)

    Article  ADS  Google Scholar 

  53. O.F. Hagena: Rev. Sci. Instrum. 63, 2374 (1991)

    Article  ADS  Google Scholar 

  54. K. Gingerich, I. Shim, S. Gupta, J. Kingcade, Jr: Surf. Sci. 156, 495 (1985)

    Article  ADS  Google Scholar 

  55. T. Scheuring, K. Weil: Surf. Sci. 156, 457 (1985)

    Article  ADS  Google Scholar 

  56. T.P. Martin: Angew. Chem. Int. Ed. Engl. 25, 197 (1986)

    Article  Google Scholar 

  57. K. Sattler, J. Mühlbach and E. Recknagel: Phys. Rev. Lett. 45, 821 (1980).

    Article  ADS  Google Scholar 

  58. G. Puchs, P. Melinon, F. Santos Aires, M. Treilleux, B. Cabaud and A. Hoareau: Phys. Rev. B 44, 3926 (1991).

    Article  ADS  Google Scholar 

  59. G. Fuchs, P. Melinon, Y. Yan, B. Cabaud, A. Hoareau, M. Treilleux, V. Paillard: Suppl. to Z. Phys. D 26, S 249 (1993).

    ADS  Google Scholar 

  60. U. Zimmerman, N. Malinowski, U. Näher, S. Frank, T.P. Martin: Z. Phys. D 31, 85 (1994)

    Article  ADS  Google Scholar 

  61. I.M. Goldby, B. von Issendorff, L. Kuipers, R.E. Palmer: Rev. Sci Instrum. 68, 3327 (1997)

    Article  ADS  Google Scholar 

  62. S.H. Baker, S.C. Thorton, A.M. Keen, T.I. Preston, C: Norris, K.W. Edmonds and C. Binns: Rev. Sci. Instrum. 68, 1853 (1997)

    Article  ADS  Google Scholar 

  63. H. Hahn, R.S. Averback: J. Appi. Phys. 67, 1113 (1990)

    Article  ADS  Google Scholar 

  64. H. Haberland, M. Karrais, M. Mall, Y. Thurner: J. Vac. Sci. Technol. A 10, 3266 (1992)

    Article  ADS  Google Scholar 

  65. H. Haberland, M. Mall, M. Moseler, Y. Qiang, T. Reiners, Y. Thurner: J. Vac. Sci. Technol. A 12, 2925 (1994)

    Article  ADS  Google Scholar 

  66. S. Yamamuro, M. Sakurai, T.J. Konno, K. Sumiyama, K. Suzuki: in Similarities and Differences between Atomic Nuclei and Clusters, Y. Abe, I. Arai, S.M. Lee, K. Yabana (eds.), (AIP Conf. Proc., vol 416, Woodbury N.Y., 1998)

    Google Scholar 

  67. S. Yamamuro, K. Sumiyama, M. Sakurai, K. Suzuki: Supramolec. Sci. 5, 239 (1998)

    Article  Google Scholar 

  68. G.D. Stein: Surf. Sci. 156, 44 (1985)

    Article  ADS  Google Scholar 

  69. E.W. Becker, K. Bier, W. Henkes: Z. Phys. 146, 333 (1956)

    Article  ADS  Google Scholar 

  70. O.F. Hagena, W. Obert: J. Chem. Phys., 56, 1793 (1972)

    Article  ADS  Google Scholar 

  71. G.D. Stein, J.A. Armstrong: J. Chem. Phys. 58, 1999 (1973)

    Article  ADS  Google Scholar 

  72. J. Gspann: Surf. Sci., 106, 219 (1981)

    Article  ADS  Google Scholar 

  73. P. Gatz and O.F. Hagena: J. Vac. Sci. Technol. A 13, 2128 (1995)

    Article  ADS  Google Scholar 

  74. S. Christ, P.M. Sherman, D.R. Glass: AIAA J. 4, 68 (1966)

    Article  Google Scholar 

  75. M. Kappes, R. Kunz, E. Schumacher: Chem. Phys. Lett. 91, 413 (1982)

    Article  ADS  Google Scholar 

  76. O. Abraham, S. Kim, G.D. Stein: J. Chem. Phys., 75, 402 (1981)

    Article  ADS  Google Scholar 

  77. E.W. Schlag, H.L. Selzle: J. Chem-Soc. Faraday Trans. 86, 2511 (1990)

    Article  Google Scholar 

  78. P. Gatz, O.F. Hagena: Appl. Surf. Sci., 91, 169 (1995)

    Article  ADS  Google Scholar 

  79. A. Amirav: Comments At. Mol. Phys. 24, 187 (1990)

    Google Scholar 

  80. F. Biasioli, A. Boschetti, E. Barborini, P. Piseri, P. Milani, S. Iannotta: Chem. Phys. Lett., 270, 115 (1997)

    Article  ADS  Google Scholar 

  81. G. Ciullo, F. Biasioli, R. Dwivedi, M. van Opbergen, A. Podestà, A. Boschetti, S. Iannotta: Proc. Symposium on Atomic and Surface Physics (SASP 98), (Going in Tirol, Austria, 1998)

    Google Scholar 

  82. O.F. Hagena: Z. Phys. D20, 425 (1991)

    ADS  Google Scholar 

  83. U. Heiz, A. Vayloyan, E. Schumacher: Rev. Sci. Instrum.,68, 3718 (1997)

    Article  ADS  Google Scholar 

  84. K. Nagaya, T. Hayakawa, M. Yao, H. Endo: J. of Non-Cryst. Solids, 205, 807 (1996)

    Article  ADS  Google Scholar 

  85. W.R. Gentry: in Atomic and Molecular Beam Methods, G. Scoles (ed.), (Oxford University Press, Oxford 1988)

    Google Scholar 

  86. C.E. Otis, P.M. Johnson: Rev. Sci. Instrum. 51, 1128 (1980)

    Article  ADS  Google Scholar 

  87. D. Bassi, S Iannotta, S. Niccolini: Rev. Sci. Instrum. 52, 8 (1981)

    Article  ADS  Google Scholar 

  88. T.E. Adams, B.H. Rockney, R.J.S. Morrison, E.R. Grant: Rev. Sci. Instrum. 52, 1469 (1981)

    Article  ADS  Google Scholar 

  89. General Valve Corporation, Series 9

    Google Scholar 

  90. L. Abad, D. Bermejo, V.J. Herrero, J. Santos, I. Tanarro: Rev. Sci. Instrum. 66, 3826 (1995)

    Article  ADS  Google Scholar 

  91. M.R. Adriaens, W. Allison, B. Feuerbacher: J. Phys. E: Sci. Instrum. 14, 1375 (1981)

    Article  ADS  Google Scholar 

  92. A. Auerbach, R. McDiarmid: Rev. Sci. Instrum. 51, 1273 (1980)

    Article  ADS  Google Scholar 

  93. J.B. Cross, J.J. Valentini: Rev. Sci. Instrum. 53, 38 (1982)

    Article  ADS  Google Scholar 

  94. P. Andresen, M. Faubel, D. Haeusler, G. Kraft, H.-W. Luelf, J.G. Skofronick: Rev. Sci. Instrum. 56, 2038 (1985)

    Article  ADS  Google Scholar 

  95. D. Proch, T. Trickl: Rev. Sci. Instrum. 60, 713 (1989)

    Article  ADS  Google Scholar 

  96. W.R. Gentry, C.F. Giese: Rev. Sci. Instrum. 49, 595 (1978)

    Article  ADS  Google Scholar 

  97. L. Li, D.M. Lubman: Rev. Sci. Instrum. 60, 499 (1989)

    Article  ADS  Google Scholar 

  98. S.M. Senken, S.C. Deskin: Rev. Sci. Instrum. 68, 4286 (1997)

    Article  ADS  Google Scholar 

  99. J.P. Bucher, D.C. Douglass, P. Xia, L.A. Bloomfield: Rev. Sci. Instrum. 61, 2374 (1990)

    Article  ADS  Google Scholar 

  100. O.F. Hagena: Rev. Sci. Instrum. 62, 2038 (1991)

    Article  ADS  Google Scholar 

  101. T.G. Dietz, M.A. Duncan, D.E. Powers, R.E. Smailey: J. Chem. Phys. 74, 6511 (1981)

    Article  ADS  Google Scholar 

  102. M.E. Geusic, M.D. Morse, S.C. O’Brien, R.E. Smailey: Rev. Sci. Instrum. 56, 2123 (1985)

    Article  ADS  Google Scholar 

  103. P.J. Brucat, L.S. Zeng, C.L. Pettiette, S. Yang, R.E. Smailey: J. Chem. Phys. 84, 3078 (1986)

    Article  ADS  Google Scholar 

  104. J. Woenckhaus, J.A. Becker: Rev. Sci. Instrum. 65, 2019 (1994)

    Article  ADS  Google Scholar 

  105. M. Pellarin et al.: Chem Phys. Lett. 224, 338 (1994)

    Article  ADS  Google Scholar 

  106. P. Gangopadhyay, J.M. Lisy: Rev. Sci. Instrum. 62, 502 (1991)

    Article  ADS  Google Scholar 

  107. U. Heiz, F. Vanolli, L. Trento, W.-D. Schneider: Rev. Sci. Instrum. 68, 1986 (1997)

    Article  ADS  Google Scholar 

  108. H.V. Kroto, J.R. Heath, S.C. O’Brien, R.F. Curl, R.E. Smalley: Nature 318, 162 (1985)

    Article  ADS  Google Scholar 

  109. S. Maruyama, L.R. Anderson, R.E. Smailey: Rev. Sci. Instrum. 61, 3686 (1990)

    Article  ADS  Google Scholar 

  110. S. Schwyn, E. Garwin, A. Schmidt-Ott: J. Aerosol Sci. 19, 639 (1988)

    Article  Google Scholar 

  111. W. Kraetschmer, L.D. Lamb, K. Fostiroupolos, D.R. Huffman: Nature 347, 354 (1990)

    Article  ADS  Google Scholar 

  112. M.H. Teng, J.J. Host, J.-H. Hwang, B.R. Elliott, J.R. Weertman, T.O. Mason, V.P. Dravid, D.L. Johnson: J. Mater. Res. 10, 233 (1995)

    Article  ADS  Google Scholar 

  113. S.L. Girshick, C.-P. Chiu: Plasma Chem. Plasma. Process. 9, 355 (1989)

    Article  Google Scholar 

  114. W.A. Saunders, P.C. Sercel, R.B. Lee, H.A. Atwater, K.J. Vahala, R.C. Fla- gan, E.J. Escorcia-Aparcio: Appl. Phys. Lett. 63, 1549 (1993)

    Article  ADS  Google Scholar 

  115. H.D. Li, H.B. Yang, S. Yu, G.T. Zou, Y.D. Li, S.Y. Liu, S.R. Yang: Appl. Phys. Lett. 69, 1285 (1996)

    Article  ADS  Google Scholar 

  116. G. Ganteför, H.R. Siekmann, H.O. Lutz, K.H. Meiwes-Broer: Chem. Phys. Lett. 165, 293 (1990)

    Article  ADS  Google Scholar 

  117. H.R. Siekmann, Ch. Lüder, J. Faehrmann, H.O. Lutz, K.H. Meiwes-Broer: Z. Phys. D 20, 417 (1991)

    Article  ADS  Google Scholar 

  118. H.R. Siekmann, E. Holub-Krappe, Bu. Wrenger, Ch. Pettenkofer, K.H. Meiwes-Broer: Z. Phys. B 90, 201 (1993)

    Article  ADS  Google Scholar 

  119. C.Y. Cha, G. Ganteför, W. Eberhardt: Rev. Sci. Instrum. 63, 5661 (1992)

    Article  ADS  Google Scholar 

  120. M. Gausa, R. Kaschner, G. Seifert, J.H. Faehrmann, H.O. Lutz, K.H. Meiwes- Broer: J. Chem. Phys. 104, 9719 (1996)

    Article  ADS  Google Scholar 

  121. P. Milani, M. Ferretti, P. Piseri, C.E. Bottani, A. Ferrari, A. Li Bassi, G. Guizzetti, M. Patrini: J. Appl. Phys. 82, 5793 (1997)

    Article  ADS  Google Scholar 

  122. P. Milani, P. Piseri, C.E. Bottani, A. Li Bassi: in Similarities and Differences between Atomic Nuclei and Clusters, Y. Abe, I. Arai, S.M. Lee, K. Yabana (eds.), (AIP Conf. Proc., vol 416, Woodbury N.Y., 1998)

    Google Scholar 

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Milani, P., Iannotta, S. (1999). Cluster Sources. In: Cluster Beam Synthesis of Nanostructured Materials. Springer Series in Cluster Physics. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-59899-9_3

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