Summary
A new generation of Pressure Sensor ICs for automotive and industrial applications will be presented. Surface μ-machined capacitive sensor cells are embedded into a standard BiCMOS-Process, yielding a monolithically integrated High-Pressure-Sensor-System. On-Chip signal conditioning includes functions such as detection of pressure dependent capacity, A/D conversion, digital calibration, temperature compensation, D/A reconversion and ratiometric analog output. The sensor systems are operating in pressure ranges up to 400 bar with an accuracy of 1.5% in a premoulded DSOF-8 standard package. With several 40 bar and 200 bar sensor systems overpressure tests up to 600 bar were passed succesfully.
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References
KPlxx series: http://www.infineon.com/
T. Scheiter, H. Kapels, K.G. Oppermann, M. Steger, C. Hierold, W.M. Werner, H.-J. Timme, “Full integration of a pressure-sensor system into a standard BiCMOS process”, Sensors & Actuators, A 67, (1998), pp. 211–214
H.J. Timme, D. Draxelmayr, C. Hierold, S. Kolb, D. Maier-Schneider, E. Pettenpaul, T. Scheiter, M. Steger, W.M. Werner, “Monolithic Pressure Sensor Microsystem”, Sensor 97 Intl. Congr., Nürnberg May 97
C. Kolle, et. al., “A monolithically integrated capacitive pressure sensor for automotive applications”, 36th Int. Conf. on Microelectronics, Devices and Materials, Postojna, Slovenia, 18.–20.Oct. 2000, pp. 123–128
D. Maier-Schneider, et. al., “Novel Surface-Micromachined Low-Power Fuses for On-Chip Calibration”, Transducers 2001, Munich
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Kapels, H., Aigner, R., Kolle, C. (2001). Monolithic Surface-Micromachined Sensor System for High Pressure Applications. In: Obermeier, E. (eds) Transducers ’01 Eurosensors XV. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-59497-7_12
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DOI: https://doi.org/10.1007/978-3-642-59497-7_12
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-42150-4
Online ISBN: 978-3-642-59497-7
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