Abstract
Semiconductor wafer manufacturing is among the most complex manufacturing processes, and hence a capital-intensive endeavor. The most common non cost-related performance measures for a semiconductor manufacturing facility are machine utilization, production yield, throughput, and last but not least cycle time. We define cycle time as the time a lot of wafers needs to travel through the semiconductor wafer manufacturing process. The overall cycle time of a lot of wafers is the sum of the total processing times of a wafer, waiting times for all resources (such as operators, machines, tools, transportation system) needed for each processing step to become available, times elapsed during measurement and quality inspections, and the time the lot has spent in transportation.
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Mittler, M., Schoemig, A.K. (2000). Comparison of Dispatching Rules for Reducing the Mean and Variability of Cycle Times in Semiconductor Manufacturing. In: Inderfurth, K., Schwödiauer, G., Domschke, W., Juhnke, F., Kleinschmidt, P., Wäscher, G. (eds) Operations Research Proceedings 1999. Operations Research Proceedings 1999, vol 1999. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-58300-1_75
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DOI: https://doi.org/10.1007/978-3-642-58300-1_75
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