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Nanoscale Characterization of Nanostructures and Nanodevices by Scanning Probe Microscopy

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Book cover Micromachines as Tools for Nanotechnology

Part of the book series: Microtechnology and MEMS ((MEMS))

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Semiconductor nanostructures such as quantum wires and quantum dots are receiving wide attention as new materials for the next generation of semiconductor devices, because many device properties are expected to be improved by quantum confinement effects [1, 2]. However, by miniaturizing the geometrical structures down to ∼ 10 nm, it becomes more difficult to fabricate such fine structures. It is also harder to characterize them on a real scale of spatial resolution.

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Authors
  1. Takuji Takahashi
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Editors and Affiliations

  1. Institute of Industrial Science, The University of Tokyo, 4-6-1 Komaba,Meguro-ku, Tokyo, 153-8505, Japan

    Hiroyuki Fujita

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Takahashi, T. (2003). Nanoscale Characterization of Nanostructures and Nanodevices by Scanning Probe Microscopy. In: Fujita, H. (eds) Micromachines as Tools for Nanotechnology. Microtechnology and MEMS. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-55503-9_8

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  • DOI: https://doi.org/10.1007/978-3-642-55503-9_8

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-62465-0

  • Online ISBN: 978-3-642-55503-9

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