Summary
To evaluate the behavior of a rotating shaft undergoing seismic vibration, two types of turbo-molecular pumps were installed on a vibration table. One of the tested pumps has unique 4-axis control magnetic bearings that utilize both electromagnets and permanent magnets and features excellent zero power control, while the order has 5-axis control magnetic bearings that control all five degrees of freedom except for the rotating component around the shaft. Three types of seismic waves, El-centro, Taft, and Hachinohe and their time responses on a building floor were produced on the vibration table. The displacement of the shaft under vibrating conditions was less than 60 μmp-p in each test, thus it was confirmed that active magnetic bearings do actually possess sufficient bearing stiffness.
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© 1989 Springer-Verlag Berlin Heidelberg
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Murai, Y., Watanabe, K., Kanemitsu, Y. (1989). Seismic Test on Turbo-Molecular Pumps Levitated by Active Magnetic Bearing. In: Schweitzer, G. (eds) Magnetic Bearings. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-51724-2_28
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DOI: https://doi.org/10.1007/978-3-642-51724-2_28
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-51726-6
Online ISBN: 978-3-642-51724-2
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