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Entwicklung und Optimierung von Prozeßkomponenten zur ionenunterstützten Abscheidung bei PVD-Verfahren pp 118–126Cite as

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Olbrich, W. (1994). Literaturverzeichnis. In: Entwicklung und Optimierung von Prozeßkomponenten zur ionenunterstützten Abscheidung bei PVD-Verfahren. IPA-IAO — Forschung und Praxis, vol 202. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-47892-5_12

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