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Toward Interactive and Intelligent Decision Support Systems pp 100–108Cite as

Development of a Diagnosis Analysis System for Ion Implanter

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Part of the book series: Lecture Notes in Economics and Mathematical Systems ((LNE,volume 286))

Abstract

Recently, research on how to simulate human cognitive functions with computers has been progressing. This field of research is called Artificial Intelligence (AI). AI can be roughly divided into speech and image processing, language processing such as machine translation, and expert systems. Of these, expert systems are currently closest to practical application.

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Author information

Authors and Affiliations

  1. Sumitomo Electric Industiries, Konohana, Osaka 554, Japan

    Y. Doi, T. Yokohara, M. Matsuo, K. Arima & N. Tachibana

  2. Nissin Electric, Ukyo, Kyoto 615, Japan

    M. Yamaji & M. Katsuragawa

Authors
  1. Y. Doi
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  2. T. Yokohara
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  3. M. Matsuo
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  4. K. Arima
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  5. N. Tachibana
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  6. M. Yamaji
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  7. M. Katsuragawa
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Editor information

Editors and Affiliations

  1. Japan Institute of Systems Research, Nippon-Italy Kyoto Kaikan, 4 Ushinomiya-cho, Yoshida, Sakyo, Kyoto 606, Japan

    Yoshikazu Sawaragi

  2. Department of Aeronautical Engineering, Kyoto University, Yoshida-honmachi, Sakyo, Kyoto 606, Japan

    Koichi Inoue

  3. Department of Applied Mathematics, Konan University, 8-9-1 Okamoto, Higashinada, Kobe 658, Japan

    Hirotaka Nakayama

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© 1987 Springer-Verlag Berlin Heidelberg

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Cite this paper

Doi, Y. et al. (1987). Development of a Diagnosis Analysis System for Ion Implanter. In: Sawaragi, Y., Inoue, K., Nakayama, H. (eds) Toward Interactive and Intelligent Decision Support Systems. Lecture Notes in Economics and Mathematical Systems, vol 286. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-46609-0_11

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  • DOI: https://doi.org/10.1007/978-3-642-46609-0_11

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-540-17719-7

  • Online ISBN: 978-3-642-46609-0

  • eBook Packages: Springer Book Archive

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