Abstract
In this chapter, three real time techniques for ablation and deposition rates monitoring are presented. First one is the ‘optoacoustic and interferometric’ approach. This method relay on the laser-mater interaction produced waves and their propagation through the material and through the surrounding atmosphere for determination of the depth of formed crater. The second one is the spectroscopy of the ablation plume. Spectroscopic analysis of the ablation plasmas is based on the direct connection between the plasma characteristics with different pulse numbers and laser fluences and the dimensions of the craters ablated on metallic targets. The third one is the deposited thickness real time measurements using microbalances. This technique relay on the single crystal quartz resonance frequency shift while additional layers of various materials are deposited on it’s surface. Few basic equations and setup schemes are presented for these techniques.
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Stafe, M., Marcu, A., Puscas, N.N. (2014). Experimental Techniques for Analyzing the Material Removal and Deposition Rates in Real Time. In: Pulsed Laser Ablation of Solids. Springer Series in Surface Sciences, vol 53. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-40978-3_6
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DOI: https://doi.org/10.1007/978-3-642-40978-3_6
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